Acta Photonica Sinica, Volume. 49, Issue 4, 0412001(2020)
A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution
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Xin-jun WAN, Song LÜ, Ke SONG, Shu-ping XIE. A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution[J]. Acta Photonica Sinica, 2020, 49(4): 0412001
Category: Instrumentation, Measurement and Metrology
Received: Dec. 17, 2019
Accepted: Jan. 17, 2020
Published Online: Apr. 24, 2020
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