Acta Photonica Sinica, Volume. 49, Issue 4, 0412001(2020)

A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution

Xin-jun WAN, Song LÜ, Ke SONG, and Shu-ping XIE
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
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    References(13)

    [6] [6] AMETEK. LuphoScan fast noncontact 3D fm measurement of aspheric optics[M]. LuphoScan, 2014.

    [13] [13] KNAUER M C, KAMINSKI J, HAUSLER G. Phase measuring deflectometry: a new approach to measure specular freefm surfaces[C].Optical Metrology in Production Engineering. International Society f Optics Photonics, 2004, 5457: 366376.

    [16] [16] WAN X, BIN B, XIE S, et al. Development of an integrated freefm optics measurement system based on phase measuring deflectometry[C]. Optical Precision Manufacturing, Testing, Applications, International Society f Optics Photonics, 2018, 10847: 1084710.

    [18] [18] ZHANG Z, LIU Y, HUANG S, et al. Fullfield 3D shape measurement of specular surfaces by direct phase to depth relationship[C]. Optical Metrology Inspection f Industrial Applications Ⅳ, International Society f Optics Photonics, 2016, 10023: 100230X.

    [21] [21] ZHANG Z, HUANG S, GAO N, et al. Fullfield 3D shape measurement of specular object having discontinuous surfaces[C]. FifthInternational Conference on Optical Photonics Engineering, International Society f Optics Photonics, 2017, 10449: 104490T.

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    Xin-jun WAN, Song LÜ, Ke SONG, Shu-ping XIE. A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution[J]. Acta Photonica Sinica, 2020, 49(4): 0412001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 17, 2019

    Accepted: Jan. 17, 2020

    Published Online: Apr. 24, 2020

    The Author Email:

    DOI:10.3788/gzxb20204904.0412001

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