Fig. 1. Schematic of stepped mirror 3D measurement system based on fringe reflection step mirror

Fig. 2. Schematic of the reverse propagation ray tracing of the fringe reflection system

Fig. 3. Simulation of the reflection ray and phase hop values and the proper structure

Fig. 4. Micron-level resolution fringe reflection 3D measurement experimental setup and physical image of the stepped mirror sample to be measured

Fig. 5. Calibration chessboard and calibration reprojection errors

Fig. 6. Reflection fringe image collected at positions 1 and 2

Fig. 7. Unwrapped horizontal and vertical phase diagrams

Fig. 8. Step mirror 3D measurement result

Fig. 9. Step mirror cross section analysis

Fig. 10. Step height measurement results of the test part from a white light interference microscope