Optics and Precision Engineering, Volume. 16, Issue 9, 1701(2008)
Research on copper gap-filling in micro electroplating process with N'N-diethylthiourea
References(3)
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ZHANG Tao, WU Yi-hui, YANG Jian-cheng, ZHANG Ping, LIU Yong-shun. Research on copper gap-filling in micro electroplating process with N'N-diethylthiourea[J]. Optics and Precision Engineering, 2008, 16(9): 1701
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Received: Feb. 18, 2008
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Tao ZHANG (zqs_0431@126.com)
CSTR:32186.14.
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