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Optics and Precision Engineering, Volume. 16, Issue 9, 1701(2008)

Research on copper gap-filling in micro electroplating process with N'N-diethylthiourea

ZHANG Tao1,*... WU Yi-hui2, YANG Jian-cheng1, ZHANG Ping2 and LIU Yong-shun2 |Show fewer author(s)
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    ZHANG Tao, WU Yi-hui, YANG Jian-cheng, ZHANG Ping, LIU Yong-shun. Research on copper gap-filling in micro electroplating process with N'N-diethylthiourea[J]. Optics and Precision Engineering, 2008, 16(9): 1701

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    Received: Feb. 18, 2008

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Tao ZHANG (zqs_0431@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology