Optics and Precision Engineering, Volume. 27, Issue 9, 1909(2019)
Review of ultra-precision optical interferential grating encoder displacement measurement technology for immersion lithography scanner
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WANG Lei-jie, ZHANG Ming, ZHU Yu, YE Wei-nan, YANG Fu-zhong. Review of ultra-precision optical interferential grating encoder displacement measurement technology for immersion lithography scanner[J]. Optics and Precision Engineering, 2019, 27(9): 1909
Paper Information
Received: May. 22, 2019
Accepted: --
Published Online: Oct. 14, 2019
The Author Email: Lei-jie WANG (wang-lj66@mail.tsinghua.edu.cn)
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