Journal of Terahertz Science and Electronic Information Technology , Volume. 21, Issue 10, 1198(2023)

Research on hydrogen annealing in UV-LIGA microfabrication of folded waveguide slow wave structures

JIANGQi... XIEYunzhu, LIXinghui, PANPan, CAIJun and FENG Jinjun |Show fewer author(s)
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    References(9)

    [1] [1] BOOSKE J H,DOBBS R J,JOYE C D,et al. Vacuum electronic high power terahertz sources[J]. IEEE Transactions on Terahertz Science and Technology, 2011,1(1):54-75. doi:10.1109/TTHZ.2011.2151610.

    [2] [2] BHATTACHARJEE S,BOOSKE J H,KORY C L,et al. Folded waveguide traveling-wave tube sources for terahertz radiation[J]. IEEE Transactions on Plasma Science, 2004,32(3):1002-1014. doi:10.1109/TPS.2004.828886.

    [9] [9] WANG Yinmin, CHEN Mingwei, ZHOU Fenghua, et al. High tensile ductility in a nanostructured metal[J]. Nature, 2002, 419 (6910):912-915. doi:10.1038/nature01133.

    [11] [11] ZI Zhangxiong,LIU Shishuo,XIE Qingmei,et al. A 70 W 81~86 GHz E-band CW travelling wave tube[C]// 2019 International

    [12] [12] XIE Qingmei, LIU Shishuo, CHEN Zhaofei, et al. A high efficiency 100 W E-band continuous wave Traveling Wave Tube[J].

    [13] [13] LI Fei, XIAO Liu, HE Jun, et al. Development of E-band continuous wave folded waveguide TWT[C]// 2021 The 22nd International Vacuum Electronics Conference(IVEC). Rotterdam, Netherlands: IEEE, 2021: 1-2. doi: 10.1109/IVEC51707. 2021.9722528.

    [14] [14] LIU Shishuo, XIE Qingmei, CHEN Zhaofei, et al. 71~76 GHz traveling wave tube amplifier for high-data-rate wireless communication[C]// 2022 International Wireless Communications and Mobile Computing(IWCMC). Dubrovnik, Croatia: IEEE, 2022:1189-1193. doi:10.1109/IWCMC55113.2022.9824649.

    [15] [15] QU Bo,LI Zhiliang,ZHAO Shilu,et al. Design and experimental study of an E-band CW space TWT[J]. IEEE Transactions on Plasma Science, 2023,51(4):1059-1064.

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    JIANGQi, XIEYunzhu, LIXinghui, PANPan, CAIJun, FENG Jinjun. Research on hydrogen annealing in UV-LIGA microfabrication of folded waveguide slow wave structures[J]. Journal of Terahertz Science and Electronic Information Technology , 2023, 21(10): 1198

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    Paper Information

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    Received: Jul. 27, 2023

    Accepted: --

    Published Online: Jan. 17, 2024

    The Author Email:

    DOI:10.11805/tkyda2023206

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