Journal of Terahertz Science and Electronic Information Technology , Volume. 21, Issue 10, 1198(2023)
Research on hydrogen annealing in UV-LIGA microfabrication of folded waveguide slow wave structures
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JIANGQi, XIEYunzhu, LIXinghui, PANPan, CAIJun, FENG Jinjun. Research on hydrogen annealing in UV-LIGA microfabrication of folded waveguide slow wave structures[J]. Journal of Terahertz Science and Electronic Information Technology , 2023, 21(10): 1198
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Received: Jul. 27, 2023
Accepted: --
Published Online: Jan. 17, 2024
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