Microelectronics, Volume. 53, Issue 4, 735(2023)

Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor

XIE Lingdong1... YANG Shuo2, ZHOU Honghui1, WENG Donglei1, ZHAO Tielin3, JIANG Keruo1 and XU Fan4 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • show less
    References(12)

    [4] [4] XIA K, LI Z, TANG Y, et al. Manned self-balanced vehicle control system based on pressure sensors for steering [J]. Electronics Letters, 2018, 54(12): 748-750.

    [5] [5] BROX D, MOHAMMADI A R, TAKAHATA K. Non-lithographically microfabricated capacitive pressure sensor for biomedical applications [J]. Electronics Letters, 2011, 47(18): 1015-1017.

    [6] [6] GINGGEN A, TARDY Y, CRIVELLI R, et al. A telemetric pressure sensor system for biomedical applications [J]. IEEE Transactions on Biomedical Engineering, 2008, 55(4): 1374-1381.

    [7] [7] ANDREWS J B, CARDENAS J A, LIM C J, et al. Fully printed and flexible carbon nanotube transistors for pressure sensing in automobile tires [J]. IEEE Sensors Journal, 2018, 18(19): 7875-7880.

    [8] [8] YAO H B, GE J, WANG C F, et al. A flexible and highly pressure-sensitive graphene-polyurethane sponge based on fractured microstructure design [J]. Adv Mater, 2013, 25(46): 6692-6698.

    [9] [9] CHUN S, KIM Y, JIN H, et al. A graphene force sensor with pressure-amplifying structure [J]. Carbon, 2014, 78: 601-608.

    [11] [11] WANG L. Temperature interference reduction for pressure sensor made of conductive polymer composite [J]. IEEE Electron Device Letter, 2016, 38(1): 123-125.

    [12] [12] LIU S, WU X, ZHANG D, et al. Ultrafast dynamic pressure sensors based on graphene hybrid structure [J]. ACS Appl Mater Interfaces, 2017, 9(28): 24148-24154.

    [13] [13] ZAHOOR R, LIU C, RIZWAN A M, et al. High sensitive pressure sensors based on multiple coating technique [J]. Chinese Physics B, 2020, 29(2): 028102.

    [14] [14] CHENG L, WANG R, HAO X, et al. Design of flexible pressure sensor based on conical microstructure PDMS-bilayer graphene [J]. Sensors, 2021, 21(1): 289.

    [15] [15] KIM K H, HONG S K, JANG N S, et al. Wearable resistive pressure sensor based on highly flexible carbon composite conductors with irregular surface morphology [J]. ACS Appl Mater Interfaces, 2017, 9(20): 17499 -17507.

    [16] [16] KIM K, JUNG M, KIM B, et al. Low-voltage, high-sensitivity and high-reliability bimodal sensor array with fully inkjet-printed flexible conducting electrode for low power consumption electronic skin [J]. Nano Energy, 2017, 41: 301-307.

    Tools

    Get Citation

    Copy Citation Text

    XIE Lingdong, YANG Shuo, ZHOU Honghui, WENG Donglei, ZHAO Tielin, JIANG Keruo, XU Fan. Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor[J]. Microelectronics, 2023, 53(4): 735

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 6, 2022

    Accepted: --

    Published Online: Jan. 3, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220397

    Topics