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Microelectronics, Volume. 53, Issue 4, 735(2023)

Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor

XIE Lingdong1... YANG Shuo2, ZHOU Honghui1, WENG Donglei1, ZHAO Tielin3, JIANG Keruo1 and XU Fan4 |Show fewer author(s)
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  • 1[in Chinese]
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  • 4[in Chinese]
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    XIE Lingdong, YANG Shuo, ZHOU Honghui, WENG Donglei, ZHAO Tielin, JIANG Keruo, XU Fan. Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor[J]. Microelectronics, 2023, 53(4): 735

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    Paper Information

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    Received: Oct. 6, 2022

    Accepted: --

    Published Online: Jan. 3, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220397

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology