Microelectronics, Volume. 53, Issue 4, 735(2023)
Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor
In order to improve the sensitivity of weak pressure sensors, a pressure sensor with excellent performance was fabricated by using microstructure to produce piezo resistive effect. Three kinds of graphene pressure sensors with different structures were studied. The layout structure, process preparation and material characterization of graphene pressure sensors were designed and studied. Finally, the sensitivity of the three graphene pressure sensors with different structures was tested. The experimental results show that the graphene pressure sensor with network structure has high sensitivity, the sensitivity can reach 0303 kPa-1 at low pressure (0-200 Pa), and the lowest pressure can be detected at 245 Pa. The graphene pressure sensor with network structure is a high performance pressure sensor that can sense weak pressure changes.
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XIE Lingdong, YANG Shuo, ZHOU Honghui, WENG Donglei, ZHAO Tielin, JIANG Keruo, XU Fan. Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor[J]. Microelectronics, 2023, 53(4): 735
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Received: Oct. 6, 2022
Accepted: --
Published Online: Jan. 3, 2024
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