[1] Jiang Guo, Jianguo Zhang, Yanan Pan, et al. A critical review on the chemical wear and wear suppression of diamond tools in diamond cutting of ferrous metals. International Journal of Extreme Manufacturing, 2, 1-24(2020).

[2] Mingwen Yuan. Research progress of diamond based electronic devices. Micronanoelectronic Technology, 49, 643-649(2012).

[3] Marcell Kiss, Sichen Mi, Gergely Huszka, et al. Diamond diffractive optics—recent progress and perspectives. Advanced Optical Technologies, 10, 19-30(2021).

[4] D Wang, W S Zhao, L Gu, et al. A study on micro-hole machining of polycrystalline diamond by micro-electrical discharge machining. Journal of Materials Processing Technology, 211, 3-11(2011).

[5] D A Axinte, D S Srinivasu, M C Kong, et al. Abrasive waterjet cutting of polycrystalline diamond: A preliminary investigation. International Journal of Machine Tools and Manufacture, 49, 797-803(2009).

[6] K Subramani, A Vasudevan, K Karthik, et al. Insights of abrasive water jet polishing process characteristics and its advancements. Materials Today: Proceedings, 52, 1113-1120(2022).

[7] Shibin Guo, Yang Qu, Fanxiu Lv, . The study on the optimizational technology of the large area free-standing diamond films’ mechanical polishing. Journal of Functional Materials, 1173-1175(2007).

[8] [8] Zheng Yuting, Cumont A E L, Bai Mingjie, et al. Smoothing of single crystal diamond by highspeed threedimensional dynamic friction polishing: Optimization surface bonds evolution mechanism[J]. International Journal of Refracty Metals Hard Materials, 2021, 96: 105472.

[9] Shiyu Li, Kang An, Siwu Shao, . Laser planarization efficiency and roughness of CVD diamond film. Diamond & Abrasives Engineering, 42, 61-68(2022).

[10] H Ohfuji, T Okuchi, S Odake, et al. Micro-/nanostructural investigation of laser-cut surfaces of single- and polycrystalline diamonds. Diamond and Related Materials, 19, 1040-1051(2010).

[11] Tong Jiang, Si Gao, Zhennan Tian, et al. Fabrication of diamond ultra-fine structures by femtosecond laser. Chinese Optics Letters, 18, 38-42(2020).

[12] Liangliang Yang, Jiangtao Wei, Zhe Ma, et al. The fabrication of micro/nano structures by laser machining. Nanomaterials (Basel), 9, 1789(2019).

[13] V I Konov. Laser in micro and nanoprocessing of diamond materials. Laser & Photonics Reviews, 6, 739-766(2012).

[14] Kang Lu, Jingxiang Xu, Qiang Sun, . Research progress on induction mechanism of graphitization phase transition of diamond materials. Materials China, 41, 536-546(2022).

[16] [16] Cui Han. Generation optimization of laser pulse in disdered fiber structure[D]. Chengdu: University of Electronic Science Technology of China, 2020.

[17] [17] Ren Yanyu. Narrow linewidth laser application study in phase sensitive optical time domain reflectometer[D]. Taiyuan: Taiyuan University of Technology, 2022.

[18] [18] Du Wen. Analytical study of laser medium heat conductionequation in solidstate[D]. Xi’an: Xi''an Technological University, 2023.

[19] [19] Kneychuk S, Guzzinati G, Verbeeck J. Measurement of the indirect b gap of diamond with EELS in STEM[J]. Physica Status Solidi(A), 2018, 215(22): 1800318.

[20] M C Granger, M Witek, J Xu, et al. Standard electrochemical behavior of high-quality, boron-doped polycrystalline diamond thin-film electrodes. Anal Chem, 72, 3793-3804(2000).

[21] [21] Hermani JP, Brecher C, Emonts M. Nanosecond laser processing of diamond materials[C]Lasers in Manufacturing Conference 2015, 2015.

[22] Xiyang Jiang, Feifei Wang, Wei Zhou, . Ultrafast Dynamics of Femtosecond Laser Interaction with Materials. Chinese Journal of Lasers, 49, 7-27(2022).

[23] Haihang Wang, Yuping Ma, Wuxiaolong, . Research progress on laser polishing mechanism and processing technology of diamond coating. Materials Protection, 54, 136-146(2021).

[24] Biao Xiong, Genyu Chen, Jiu Yin, . Experimental research on conical array of single crystal diamond based on femtosecond laser. Applied Laser, 38, 270-277(2018).

[25] M S Komlenok, V V Kononenko, V G Ralchenko, et al. Laser induced nanoablation of diamond materials. Physics Procedia, 12, 37-45(2011).

[26] Haitao Jiang, Jianlei Cui, Dongping Yin, . Femtosecond laser processing technology of diamond micro-channel heat sink based on radar power module. China Mechanical Engineering, 261-268(2022).

[27] [27] Yan Xiongbo. Graphitization behavi of CVD freesting diamond films at high temperature [D]. Beijing: University of Science Technology Beijing, 2019. (in Chinese)

[28] J Smedley, J Bohon, Q Wu, et al. Laser patterning of diamond. Part I. Characterization of surface morphology. Journal of Applied Physics, 105, 123107(2009).

[29] T V Kononenko, P A Pivovarov, A A Khomich, et al. Effect of absorbing coating on ablation of diamond by IR laser pulses. Quantum Electronics, 48, 244-250(2018).

[30] T V Kononenko, M Meier, M S Komlenok, et al. Microstructuring of diamond bulk by IR femtosecond laser pulses. Applied Physics A, 90, 645-651(2007).

[31] T V Kononenko, P A Pivovarov, A A Khomich, et al. Processing of polycrystalline diamond surface by IR laser pulses without interior damage. Optics & Laser Technology, 117, 87-93(2019).

[32] Yan Liu, Gengxu Chen, Min Song, et al. Fabrication of nitrogen vacancy color centers by femtosecond pulse laser illumination. Opt Express, 21, 12843-12848(2013).

[33] [33] Kononenko V V, Vlasov I I, Gololobov V M, et al. Nitrogenvacancy defects in diamond produced by femtosecond laser nanoablation technique [J]. Applied Physics Letters, 2017, 111(8): 081101.

[34] G Dumitru, V Romano, H P Weber, et al. Femtosecond ablation of ultrahard materials. Applied Physics A: Materials Science & Processing, 74, 729-739(2002).

[35] M Forster, C Huber, O Armbruster, et al. 50-nanometer femtosecond pulse laser induced periodic surface structures on nitrogen-doped diamond. Diamond and Related Materials, 74, 114-118(2017).

[36] [36] Huang Min, Zhao Fuli, Cheng Ya, et al. Mechanisms of ultrafast laserinduced deepsubwavelength gratings on graphite diamond [J]. Physical Review B, 2009, 79(12): 125436.

[37] M Mastellone, A Bellucci, M Girolami, et al. Deep-Subwavelength 2D periodic surface nanostructures on diamond by double-pulse femtosecond laser irradiation. Nano Lett, 21, 4477-4483(2021).

[38] Haihe Jiang. Development and forecast of the laser processing technology application. Journal of Atmospheric and Environmental, 1-12(2001).

[39] B N Chichkov, C Momma, S Nolte, et al. Femtosecond, picosecond and nanosecond laser ablation of solids. Applied Physics A, 63, 109-115(1996).

[40] [40] Zhang Shaojun, Guo Zhi, Cheng Jiamin, et al. Arrival time diagnosis method of high refrequency hard Xray free electron laser[J]. Acta Physica Sinica, 2023, 72(10): 262272. (in Chinese)

[41] [41] Qi Zhina, Zheng Yuting, Zhu Xiaohua, et al. An ultrathick alldiamond microchannel heat sink f singlephase heat transmission efficiency enhancement[J]. Vacuum, 2020, 177: 17.

[42] Yasuhiro Okamoto, Tubas Okubo, Atsuya Kajitani, et al. High-quality micro-shape fabrication of monocrystalline diamond by nanosecond pulsed laser and acid cleaning. International Journal of Extreme Manufacturing, 4, 025301(2022).

[43] G Eberle, K Jefimovs, K Wegener. Characterisation of thermal influences after laser processing polycrystalline diamond composites using long to ultrashort pulse durations. Precision Engineering, 39, 16-24(2015).

[44] Bo Mao, Arpith Siddaiah, Yiliang Liao, et al. Laser surface texturing and related techniques for enhancing tribological performance of engineering materials: A review. Journal of Manufacturing Processes, 53, 153-173(2020).

[45] [45] Zhang Zhen, Zhang Quanli, Wang Yeqing, et al. Modeling of the temperature field in nanosecond pulsed laser ablation of single crystalline diamond [J]. Diamond Related Materials, 2021, 116: 108402.

[46] N Takayama, J Yan. Mechanisms of micro-groove formation on single-crystal diamond by a nanosecond pulsed laser. Journal of Materials Processing Technology, 243, 299-311(2017).

[47] G B J Cadot, K Thomas, J P Best, et al. Investigation of the microstructure change due to phase transition in nanosecond pulsed laser processing of diamond. Carbon, 127, 349-365(2018).

[48] T V Kononenko, V V Kononenko, S M Pimenov, et al. Effects of pulse duration in laser processing of diamond-like carbon films. Diamond and Related Materials, 14, 1368-1376(2005).

[49] Qiuling Wen, Xinyu Wei, Hualu Wang, . Characteristics and mechanism of CVD single crystal diamond processed by picosecond laser. Acta Photonica Sinica, 50, 126-136(2021).

[50] N Takayama, J Ishizuka, J Yan. Microgrooving of a single-crystal diamond tool using a picosecond pulsed laser and some cutting tests. Precision Engineering, 53, 252-262(2018).

[51] [51] Pimenov S M, Khomich A A, Neuenschwer B, et al. Picosecondlaser bulk modification induced enhancement of nitrogenvacancy luminescence in diamond[J]. Journal of the Optical Society of America B, 2016, 33(3): B49B55.

[52] S M Pimenov, B Neuenschwander, B Jäggi, et al. Effect of crystal orientation on picosecond-laser bulk microstructuring and Raman lasing in diamond. Applied Physics A, 114, 1309-1319(2013).

[53] S M Pimenov, I I Vlasov, A A Khomich, et al. Picosecond-laser-induced structural modifications in the bulk of single-crystal diamond. Applied Physics A, 105, 673-637(2011).

[54] R L Fork, B I Greene, C V Shank. Generation of optical pulses shorter than 0.1 psec by colliding pulse mode locking. Applied Physics Letters, 38, 671-672(1981).

[55] C B Schaffer, A Brodeur, E Mazur. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses. Meas Sci Technol, 12, 1784-1794(2001).

[56] R R Gattass, E Mazur. Femtosecond laser micromachining in transparent materials. Nature Photonics, 2, 219-225(2008).

[57] E N Glezer, M Milosavljevic, L Huang, et al. Three-dimensional optical storage inside transparent materials. Opt Lett, 21, 2023-2025(1996).

[58] [58] Qu Meina, Jin Tan, Xie Guizhi, et al. Developing a novel binderless diamond grinding wheel with femtosecond laser ablation evaluating its perfmance in grinding soft brittle materials[J]. Journal of Materials Processing Technology, 2020, 275: 19.

[59] O H Zalloum, M Parrish, A Terekhov, et al. An amplified femtosecond laser system for material micro-/nanostructuring with an integrated Raman microscope. Rev Sci Instrum, 81, 053906(2010).

[60] Y Ogawa, M Ota, K Nakamoto, et al. A study on machining of binder-less polycrystalline diamond by femtosecond pulsed laser for fabrication of micro milling tools. CIRP Annals, 65, 245-248(2016).

[61] Yuan Han, Yuping Ma, Haihang Wang, . Material removal rate of nano-diamond coating ablated by femtosecond laser. Laser & Optoelectronics Progress, 58, 1114001(2021).

[62] Xiangyang Fang. The research on laser cutting technology of CVD diamond film. Ningxia Engineering Technology, 157-160(2003).

[63] Ji Wang, Peng Zhang, Tianrun Zhang, et al. Experiments of high frequency laser cutting of chemical vapor deposition diamond with large cutting depth. Optics and Precision Engineering, 30, 89-95(2022).

[64] J K Park, V M Ayres, J Asmussen, et al. Precision micromachining of CVD diamond films. Diamond and Related Materials, 9, 1154-1158(2000).

[65] Lei Yan, Feifei Wu, Yuheng Deng, et al. Study on laser processing of chemical vapor deposition diamond thick film. Diamond & Abrasives Engineering, 32, 6-9(2012).

[66] Qiang Guo, Zhixin Jia, Jianqiang Gao, . Technological study on laser cutting of polycrystalline diamond compact. Laser & Infrared, 47, 686-692(2017).

[67] B Jeong, B Lee, J H Kim, et al. Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses. Quantum Electronics, 50, 201-204(2020).

[68] A A Martin, J Bishop, W Burnett, et al. Ultra-high aspect ratio pores milled in diamond via laser, ion and electron beam mediated processes. Diamond and Related Materials, 105, 107806(2020).

[69] N C Golota, D Preiss, Z P Fredin, et al. High aspect ratio diamond nanosecond laser machining. Appl Phys A Mater Sci Process, 129, 490(2023).

[70] Tianlun Shen, Tao Chen, Jinhai Si, et al. Structural changesduring femtosecond laser percussion drilling of high-aspect-ratiodiamond microholes. Optical Engineering, 016103(2022).

[71] S Kumar, S M Eaton, M Bollani, et al. Laser surface structuring of diamond with ultrashort Bessel beams. Sci Rep, 8, 14021(2018).

[72] [72] Dong Chunyan, Zhang Xiaoyu, Gu Dehua, et al. Analysis of diamond micropous fming acteristics defects under different laser powers[J]. Chinese Journal of Lasers, 2023, 50(24): 2402404. (in Chinese)

[73] Xinyu Wei, Qiuling Wen, Jing Lu, . Research on parameters optimization of diamond microgrooves processed by ultravilot nanosecond laser. Chinese Journal of Lasers, 49, 1002406(2022).

[74] Jianheng Huang, Guowen Liang, Ji Li, . Femtosecond laser processing of polycrystalline diamond micro-structure array. Chinese Journal of Lasers, 44, 0302007(2017).

[75] Junlei Tu, Jiadong Shi, Liangxian Chen, et al. Surface termination of the diamond microchannel and single-phase heat transfer performance. International Journal of Heat and Mass Transfer, 199, 123481(2022).

[76] M Dudek, A Rosowski, M Kozanecki, et al. Microstructures manufactured in diamond by use of laser micromachining. Materials (Basel), 13, 1199(2020).

[77] Jian Dou, Jianlei Cui, Xuyang Fang, et al. Theoretical and experimental study on machining rectangular microgroove of diamond by femtosecond laser. Integrated Ferroelectrics, 208, 104-116(2020).

[78] M Shinoda, R R Gattass, E Mazur. Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces. Journal of Applied Physics, 105, 053102(2009).

[79] Huagang Liu, Linran Xie, Wenxiong Lin, et al. Optical quality laser polishing of CVD diamond by UV pulsed laser irradiation. Advanced Optical Materials, 9, 2100537(2021).

[80] [80] Xu Feng. Study on laser processing machining of CVD diamond thickfilm[D]. Nanjing: Nanjing University of Aeronautics Astronautics, 2002. (in Chinese)

[81] M Prieske, F Vollertsen. Picosecond-laser polishing of CVD-diamond coatings without graphite formation. Materials Today: Proceedings, 40, 1-4(2021).

[82] [82] Komlenok M, Pashinin V, Sedov V, et al. Femtosecond nanosecond laser polishing of rough polycrystalline diamond [J]. Laser Physics, 2022, 32(8): 084003.

[83] H Y Tsai, C J Ting, C P Chou. Evaluation research of polishing methods for large area diamond films produced by chemical vapor deposition. Diamond and Related Materials, 16, 253-261(2007).

[84] P Tosin, A Blatter, W Lüthy. Laser‐induced surface structures on diamond films. Journal of Applied Physics, 78, 3797-3800(1995).

[85] [85] Glo S, Lüthy W, Weber H P, et al. UV laser polishing of thick diamond films f IR windows [J]. Applied Surface Science, 1999, 135139.

[86] [86] Hu Beichen, Zhang Zhiyao, Zhang Hongmei, et al. Research progress of laserassisted spalling f SiC single crystal [J]. Electronics Process Technology, 2022, 43(4): 192 195. (in Chinese)

[87] Fei Wang, Chao Shan, Jianping Yan, et al. Application of femtosecond laser technique in single crystal diamond film separation. Diamond and Related Materials, 63, 69-74(2016).

[88] D Kalyanasundaram, A Schmidt, P Molian, et al. Hybrid CO₂ Laser/Waterjet machining of polycrystalline diamond substrate: Material separation through transformation induced controlled fracture. Journal of Manufacturing Science and Engineering, 136, 041001(2014).

[89] [89] Malshe A P, Ozkan A M, Brown W D. Process f sequential multibeam laser processing of materials: America, US006168744B1 [P]. 20010102.

[90] Guangfeng Shi, Dongdong Han, Shukun Wang, et al. Analysis and evaluation of natural diamond cut by water jet-guided laser. Aer Adv Eng Res, 146, 195-198(2017).

[91] [91] Richmann A, Kuzminykh Y, Richerzhagen B, et al. Laser microjet cutting of up to 3 mm thick sapphire[C]Int Congr Appl Lasers ElectroOptics, 2014: 1139–1143.

[92] [92] Qiao Hongchao, Cao Zhihe, Cui Jianfeng, et al, Experimental study on water jet guided laser micromachining of monocrystalline silicon[J]. Optics & Laser Technology, 2021, 140: 107507.

[93] M Silvennoinen, J J J Kaakkunen, K Paivasaari, et al. Water spray assisted ultrashort laser pulse ablation. Applied Surface Science, 265, 865-869(2013).

[94] [94] Tangwarodomnukun V, Likhitangsuwat P, Tevinpibanphan O, et al. Laser ablation of titanium alloy under a thin flowing water layer[J]. Int J Mach Tool Manu, 2015, 89: 14–28.

[95] V Tangwarodomnukun, T Wuttisarn. Evolution of milled cavity in the multiple laser scans of titanium alloy under a flowing water layer. Int J Adv Manuf Technol, 92, 293-302(2017).

[96] [96] Guo Bing, Zhang Jun, Wu Mingtao, et al. Water assisted pulsed laser machining of microstructured surface on CVD diamond coating tools[J], Journal of Manufacturing Processes, 2020, 56: 591601.