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Laser & Optoelectronics Progress, Volume. 48, Issue 11, 111101(2011)

Pupil Shaping Techniques in High Resolution Projection Exposure Tools

Hu Zhonghua1,2、*, Yang Baoxi1, Zhu Jing1, Xiao Yanfeng1,2, Zeng Aijun1, Huang Lihua1, Zhao Yongkai1, and Huang Huijie1
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    Article index updated:May. 21, 2024

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    Hu Zhonghua, Yang Baoxi, Zhu Jing, Xiao Yanfeng, Zeng Aijun, Huang Lihua, Zhao Yongkai, Huang Huijie. Pupil Shaping Techniques in High Resolution Projection Exposure Tools[J]. Laser & Optoelectronics Progress, 2011, 48(11): 111101

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    Paper Information

    Category: Reviews

    Received: Apr. 29, 2011

    Accepted: --

    Published Online: Sep. 30, 2011

    The Author Email: Zhonghua Hu (huzhonghua@siom.ac.cn)

    DOI:10.3788/lop48.111101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology