Laser & Optoelectronics Progress, Volume. 48, Issue 11, 111101(2011)
Pupil Shaping Techniques in High Resolution Projection Exposure Tools
In the high resolution optical lithography technology, illumination pupil shaping is employed to enhance the lithography resolution and achieve high imaging performance by using various illumination modes according to different mask structures. In this paper, three approaches of pupil shaping techniques based on diffractive optical element (DOE), micro lens array (MLA) and micro mirror array (MMA) are summarized. The principles, design and manufacturing methods are concluded.
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Hu Zhonghua, Yang Baoxi, Zhu Jing, Xiao Yanfeng, Zeng Aijun, Huang Lihua, Zhao Yongkai, Huang Huijie. Pupil Shaping Techniques in High Resolution Projection Exposure Tools[J]. Laser & Optoelectronics Progress, 2011, 48(11): 111101
Category: Reviews
Received: Apr. 29, 2011
Accepted: --
Published Online: Sep. 30, 2011
The Author Email: Zhonghua Hu (huzhonghua@siom.ac.cn)