Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology

Xu Wang; Binzhi Zhang

doi:10.3788/COL201513.S22205

Chinese Optics Letters, Volume. 13, Issue Suppl., S22205(2015)

Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology

Xu Wang^* and Binzhi Zhang

Author Affiliations

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun 130033, China

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Xu Wang, Binzhi Zhang. Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22205

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Paper Information

Category: Optical Design and Fabrication

Received: Jan. 16, 2015

Accepted: Mar. 10, 2015

Published Online: Aug. 8, 2018

The Author Email: Xu Wang (13844848195@163.com)

DOI:10.3788/COL201513.S22205

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology