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Chinese Optics Letters, Volume. 13, Issue Suppl., S22205(2015)

Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology

Xu Wang* and Binzhi Zhang
Author Affiliations
  • Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun 130033, China
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    Three co-axial quartz tube: (a) schematic picture and (b) working picture.

    Fig. 1. Three co-axial quartz tube: (a) schematic picture and (b) working picture.

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    Microscope testing result on RB–SiC: (a) before PCET (200×); (b) after PCET (200×); (c) after PCET (2000×).

    Fig. 2. Microscope testing result on RB–SiC: (a) before PCET (200×); (b) after PCET (200×); (c) after PCET (2000×).

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    Microscope testing result on S-SiC: (a) before PCET (200×); (b) before PCET (2000×); (c) fabricated with PCET (200×); (d) fabricated with PCET (2000×).

    Fig. 3. Microscope testing result on S-SiC: (a) before PCET (200×); (b) before PCET (2000×); (c) fabricated with PCET (200×); (d) fabricated with PCET (2000×).

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    Microscope testing result (200×) on fused silicon fabricated with PCET: (a) before PCET; (b) after PCET.

    Fig. 4. Microscope testing result (200×) on fused silicon fabricated with PCET: (a) before PCET; (b) after PCET.

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    Working pictures: (a) Zygo NewView 7200; (b) Mitutoyo Surftest SJ-410.

    Fig. 5. Working pictures: (a) Zygo NewView 7200; (b) Mitutoyo Surftest SJ-410.

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    Testing result with on fused silica workpiece: (a) Zygo NewView 7200 before fabrication with PCET; (b) Mitutoyo Surftest SJ-410 before fabrication with PCET; (c) Mitutoyo Surftest SJ-410 after fabrication with PCET.

    Fig. 6. Testing result with on fused silica workpiece: (a) Zygo NewView 7200 before fabrication with PCET; (b) Mitutoyo Surftest SJ-410 before fabrication with PCET; (c) Mitutoyo Surftest SJ-410 after fabrication with PCET.

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    Testing result with Zygo NewView 7200 on RB-SiC workpiece: (a) before fabrication with PCET; (b) after fabrication with PCET.

    Fig. 7. Testing result with Zygo NewView 7200 on RB-SiC workpiece: (a) before fabrication with PCET; (b) after fabrication with PCET.

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    Testing result with Mitutoyo Surftest SJ-410: (a) after fabrication with PCET on RB–SiC workpiece; (b) before PCET on S-SiC sample; (c) after PCET on S-SiC sample.

    Fig. 8. Testing result with Mitutoyo Surftest SJ-410: (a) after fabrication with PCET on RB–SiC workpiece; (b) before PCET on S-SiC sample; (c) after PCET on S-SiC sample.

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    Testing result with Zygo NewView 7200 on Si workpiece (unpolished sample after coating on RB–SiC): (a) before fabrication with PCET; (b) after fabrication with PCET.

    Fig. 9. Testing result with Zygo NewView 7200 on Si workpiece (unpolished sample after coating on RB–SiC): (a) before fabrication with PCET; (b) after fabrication with PCET.

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    Surface roughness of three different materials fabricated with PCET: 1, fused silicon; 2, RB–SiC; 3, S-SiC; 4, Si.

    Fig. 10. Surface roughness of three different materials fabricated with PCET: 1, fused silicon; 2, RB–SiC; 3, S-SiC; 4, Si.

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    • Table 1. Experimental Parameters

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      Table 1. Experimental Parameters

      MaterialFused SilicaRB–SiCSi
      RF power (W)100010001000
      Cooling Gas Flow (slm)151515
      Plasma Gas Flow (sccm)300–2000300–2000300–2000
      CF4 (sccm)0–1000–1000–100
      O2 (sccm)0–300–300–30
      Working Distance (mm)252525
      Sample Temperature (°C)215105160
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    Xu Wang, Binzhi Zhang. Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22205

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 16, 2015

    Accepted: Mar. 10, 2015

    Published Online: Aug. 8, 2018

    The Author Email: Xu Wang (13844848195@163.com)

    DOI:10.3788/COL201513.S22205

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology