Semiconductor Optoelectronics, Volume. 43, Issue 6, 1068(2022)

Fast Response MEMS Flexible Temperature Sensor Based on Polyimide/Graphite Composite Substrate

LIU Yu1, SHI Haocheng2, GUO Chunhuan2, WANG Xuewen3, and YANG Zhuoqing1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    LIU Yu, SHI Haocheng, GUO Chunhuan, WANG Xuewen, YANG Zhuoqing. Fast Response MEMS Flexible Temperature Sensor Based on Polyimide/Graphite Composite Substrate[J]. Semiconductor Optoelectronics, 2022, 43(6): 1068

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    Paper Information

    Special Issue:

    Received: Oct. 9, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022100901

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