Semiconductor Optoelectronics, Volume. 43, Issue 6, 1068(2022)
Fast Response MEMS Flexible Temperature Sensor Based on Polyimide/Graphite Composite Substrate
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LIU Yu, SHI Haocheng, GUO Chunhuan, WANG Xuewen, YANG Zhuoqing. Fast Response MEMS Flexible Temperature Sensor Based on Polyimide/Graphite Composite Substrate[J]. Semiconductor Optoelectronics, 2022, 43(6): 1068
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Received: Oct. 9, 2022
Accepted: --
Published Online: Jan. 27, 2023
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