Semiconductor Optoelectronics, Volume. 43, Issue 6, 1068(2022)
Fast Response MEMS Flexible Temperature Sensor Based on Polyimide/Graphite Composite Substrate
To solve the problem of the substrate′s slow thermal conduction for flexible temperature sensors to quickly monitor the temperature of bearings and other curved surfaces, high thermal conductivity composites were prepared by doping 3wt% graphite (GR) into polyimide (PI), which reached a thermal conductivity of 0.777W·m-1·K-1 and had good insulation properties. Based on the microfabrication technique, Pt film flexible temperature sensor was prepared on the GR/PI composite film, and its dynamic response characteristics are improved with the response time of 71ms, which is better than that of the Pt film flexible temperature sensor on pure PI substrate. In addition, the electrical properties such as linearity, sensitivity and measurement repeatability are good. The prepared sensor was used for temperature measurement on metal shaft surfaces, and the difference between the measured values is small (within ±2℃) compared with a commercial infrared camera.
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LIU Yu, SHI Haocheng, GUO Chunhuan, WANG Xuewen, YANG Zhuoqing. Fast Response MEMS Flexible Temperature Sensor Based on Polyimide/Graphite Composite Substrate[J]. Semiconductor Optoelectronics, 2022, 43(6): 1068
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Received: Oct. 9, 2022
Accepted: --
Published Online: Jan. 27, 2023
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