Journal of Semiconductors, Volume. 44, Issue 7, 072803(2023)

Experimental investigation on the instability for NiO/β-Ga2O3 heterojunction-gate FETs under negative bias stress

Zhuolin Jiang1, Xiangnan Li1, Xuanze Zhou2, Yuxi Wei1, Jie Wei1, Guangwei Xu2、*, Shibing Long2, and Xiaorong Luo1、**
Author Affiliations
  • 1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
  • 2School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
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    Figures & Tables(6)
    (Color online) (a) Cross-sectional view of the proposed NiO/β-Ga2O3 HJ-FET and the main fabrication process flows. Schematic representation of the testing method for the analysis instability under NBS at (b) single pulse, and (c) multiple pulses with a prolonged ts.
    (Color online) Measured DC characteristics: (a) log-scale transfer characteristics and (b) output characteristics.
    (Color online) Measured (a) VGS-IDS and (b) VGS-IGS curves after NBS as a function of tr. Extracted (c) ∆VTH and (d) IGS, off degradation ratio.
    (Color online) Measured (a) VGS-IDS and (b) VGS-IGS curves after NBS as a function of tr. Extracted (c) ∆VTH and (d) IGS, off degradation ratio.
    (Color online) (a) Measured VGS-IDS curves during NBS at VG,s = -20 V. (b) Extracted ∆VTH.
    (Color online) Schematic cross-sections of NiO/β-Ga2O3 HJ-FET (a) at initial, (b) under NBS, and (c) after NBS, respectively.
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    Zhuolin Jiang, Xiangnan Li, Xuanze Zhou, Yuxi Wei, Jie Wei, Guangwei Xu, Shibing Long, Xiaorong Luo. Experimental investigation on the instability for NiO/β-Ga2O3 heterojunction-gate FETs under negative bias stress[J]. Journal of Semiconductors, 2023, 44(7): 072803

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    Paper Information

    Category: Articles

    Received: Jan. 30, 2023

    Accepted: --

    Published Online: Aug. 7, 2023

    The Author Email: Xu Guangwei (xugw@ustc.edu.cn), Luo Xiaorong (xrluo@uestc.edu.cn)

    DOI:10.1088/1674-4926/44/7/072803

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