Optoelectronics Letters, Volume. 10, Issue 1, 24(2014)
248 nm imaging photolithography assisted by surface plasmon polariton interference
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TIAN Man-man, MI Jia-jia, SHI Jian-ping, WEI Nan-nan, ZHAN Ling-li, HUANG Wan-xia, ZUO Ze-wen, WANG Chang-tao, LUO Xian-gang. 248 nm imaging photolithography assisted by surface plasmon polariton interference[J]. Optoelectronics Letters, 2014, 10(1): 24
Received: Sep. 26, 2013
Accepted: --
Published Online: Oct. 12, 2017
The Author Email: Jian-ping SHI (shi_jian_ping@hotmail.com)