Fig. 1. Structural diagram of MEMS-VCSEL

Fig. 2. Three-dimensional beam structure and stress analysis. (a) Stress analysis of simplified beam structure; (b) three-dimensional diagram of beam structure

Fig. 3. Structural diagram of suspended mirror. (a) Constant section structure; (b) hyperbolic structure

Fig. 4. Stress distribution for beam structure. (a) Upper surface of constant section structure; (b) lower surface of constant section structure; (c) upper surface of hyperbolic structure; (d) lower surface of hyperbolic structure

Fig. 5. Stress distribution on end surfaces of upper and lower surfaces. (a) Constant section structure; (b) hyperbolic structure

Fig. 6. Maximum stress of two end surfaces and waist section under different a

Fig. 7. Optical field distribution of MEMS-VCSEL. (a) SCD structure; (b) ACD structure

Fig. 8. Resonant wavelength of MEMS-VCSEL varying with applied bias

Fig. 9. Resonant frequencies of constant section structure and hyperbolic structure varying with applied bias