Design Optimization of Mechanical Support Structures in Tunable Vertical Cavity Surface Emitting Lasers

Lü Jiagang; Wei Li; Yuxuan Qi; Zhipeng Pan; Li Zhong; Suping Liu; Xiaoyu Ma

doi:10.3788/AOS221271

Acta Optica Sinica, Volume. 43, Issue 1, 0114003(2023)

Design Optimization of Mechanical Support Structures in Tunable Vertical Cavity Surface Emitting Lasers

Lü Jiagang^1,2, Wei Li^1、*, Yuxuan Qi^1,2, Zhipeng Pan^1,2, Li Zhong¹, Suping Liu¹, and Xiaoyu Ma¹

¹National Engineering Research Center for Optoelectronic Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

²College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

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Lü Jiagang, Wei Li, Yuxuan Qi, Zhipeng Pan, Li Zhong, Suping Liu, Xiaoyu Ma. Design Optimization of Mechanical Support Structures in Tunable Vertical Cavity Surface Emitting Lasers[J]. Acta Optica Sinica, 2023, 43(1): 0114003

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Paper Information

Category: Lasers and Laser Optics

Received: Jun. 7, 2022

Accepted: Jul. 11, 2022

Published Online: Jan. 6, 2023

The Author Email: Li Wei (liwei66@semi.ac.cn)

DOI:10.3788/AOS221271

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology