Study on LD-pumped Nd:YAG laser cutter for silicon wafer

CUI Jian-feng; ZHAO Jing; FAN Zhong-wei; ZHAO Cun-hua; ZHANG Jing; NIU Gang; SHI Zhao-hui; PEI Bo; ZHANG Guo-xin; XUE Yan; BI Yong; QI Yan

Optics and Precision Engineering, Volume. 14, Issue 5, 829(2006)

CUI Jian-feng1...2,3,*, ZHAO Jing4, FAN Zhong-wei1,3,5, ZHAO Cun-hua1,2,3, ZHANG Jing1,2,3, NIU Gang1,2,3, SHI Zhao-hui1,2,3, PEI Bo3,5, ZHANG Guo-xin3, XUE Yan3, BI Yong5 and QI Yan5 |Show fewer author(s)

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References(2)

[1] [1] http://www.china-si.net/xshyd/gcl.htm[Z]

[8] [8] CUI J F,FAN ZH W.Research on LD-Pumped dual wavelength Nd:YAG laser with high beam quality for machining[C].SPIE,Changchun:20th Congress of the International Commission for Optics,2005

CLP Journals

[1] ZHENG Xin-yi, JIA Zhen-yuan, REN Xiao-tao, WANG Fu-ji. Analysis on effect of discharge parameters on cylindricity of small holes by orthogonal experiments[J]. Optics and Precision Engineering, 2010, 18(2): 426

[2] Yin Cong, Huang Shengye, Zhang Shiwen, Shi Chunying, Liu Xiuying, Wang Hanping, Cai Shan, Qian Jin. Laser Diode Side Pumped Nd:YAG TEM00-Mode Laser for Reducing Taper of Micro Holes[J]. Chinese Journal of Lasers, 2010, 37(S1): 64

[3] LIU Jian, LU Jian, NI Xiao-wu, DAI Gang, ZHANG Liang. Fracture behavior during pulsed laser irradiating silicon wafer[J]. Optics and Precision Engineering, 2011, 19(2): 414

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CUI Jian-feng, ZHAO Jing, FAN Zhong-wei, ZHAO Cun-hua, ZHANG Jing, NIU Gang, SHI Zhao-hui, PEI Bo, ZHANG Guo-xin, XUE Yan, BI Yong, QI Yan. Study on LD-pumped Nd:YAG laser cutter for silicon wafer[J]. Optics and Precision Engineering, 2006, 14(5): 829

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