Optics and Precision Engineering, Volume. 14, Issue 5, 829(2006)
Study on LD-pumped Nd:YAG laser cutter for silicon wafer
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CUI Jian-feng, ZHAO Jing, FAN Zhong-wei, ZHAO Cun-hua, ZHANG Jing, NIU Gang, SHI Zhao-hui, PEI Bo, ZHANG Guo-xin, XUE Yan, BI Yong, QI Yan. Study on LD-pumped Nd:YAG laser cutter for silicon wafer[J]. Optics and Precision Engineering, 2006, 14(5): 829
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Received: Feb. 15, 2006
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Jian-feng CUI (cuijf@163.com)
CSTR:32186.14.