Acta Optica Sinica, Volume. 42, Issue 10, 1012004(2022)
Measurement Method for Surface Defects on ICF Capsules Based on White Light Interferometry
According to the real height measurement of defects on the surface of microspheres such as capsules in laser inertial confinement fusion (ICF) experiments, a null microscopy interferometric measurement method based on vertical scanning white light interferometry is proposed to solve the problem of missing integer multiples of phase 2π at the defect jumps in existing measurement methods. The method adopts the concept of white light spherical null interferometric microscopy, and obtains the full field of view white light interferograms through vertical scanning spherical interference. Then, the seven-step phase-shifting algorithm and the bat-wing correction algorithm are used to calculate the surface defect morphology of ICF capsules. Finally, the white light interferometry is compared with the laser interferometry through experiments and the results show that the white light interferometry can effectively solve the problem of missing integer multiples of phase 2π at the defect jumps, realize the real height measurement of the ICF capsule surface defects, and extend the measurement range of microsphere surface defects.
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Zhiyao Yin, Renhui Guo, Xin Yang, Chengxing Liu, Jianxin Li. Measurement Method for Surface Defects on ICF Capsules Based on White Light Interferometry[J]. Acta Optica Sinica, 2022, 42(10): 1012004
Category: Instrumentation, Measurement and Metrology
Received: Oct. 8, 2021
Accepted: Dec. 20, 2021
Published Online: May. 10, 2022
The Author Email: Guo Renhui (grh@njust.edu.cn)