Acta Optica Sinica, Volume. 41, Issue 11, 1111002(2021)

Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory

Yazeng Gao1,2,4, Lujie Wu1,5, Weier Lu1,2,4、*, Hongyao Liu1,2、**, Yang Xia1,2,4, Lili Zhao1,2,4, Yanli Li3, Xiangdong Kong3, and Li Han3
Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2School of Microelectronics, University of Chinese Academy of Sciences, Beijing 101407, China
  • 3Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China
  • 4Beijing Engineering Research Center for Microelectronics Preparation Equipment, Beijing 100029, China
  • 5School of Science, Beijing Jiaotong University, Beijing 100044, China
  • show less
    Figures & Tables(4)
    Structure of the hard X-ray FZP. (a) Schematic diagram of the PZP structure; (b) SEM image
    Variation curves of the diffraction efficiencies of different combination FZP with thickness. (a) Energy of the light source is 8 keV; (b) energy of the light source is 15 keV
    Relationship between maximum diffraction efficiency, optimal thickness and source energy
    Optimal thicknesses and fluctuation ranges of the FZP under different source energy
    Tools

    Get Citation

    Copy Citation Text

    Yazeng Gao, Lujie Wu, Weier Lu, Hongyao Liu, Yang Xia, Lili Zhao, Yanli Li, Xiangdong Kong, Li Han. Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory[J]. Acta Optica Sinica, 2021, 41(11): 1111002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Imaging Systems

    Received: Oct. 20, 2020

    Accepted: Jan. 8, 2021

    Published Online: Jun. 7, 2021

    The Author Email: Lu Weier (luweier@ime.ac.cn), Liu Hongyao (liuhongyao@ime.ac.cn)

    DOI:10.3788/AOS202141.1111002

    Topics