Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory

Yazeng Gao; Lujie Wu; Weier Lu; Hongyao Liu; Yang Xia; Lili Zhao; Yanli Li; Xiangdong Kong; Li Han

doi:10.3788/AOS202141.1111002

Acta Optica Sinica, Volume. 41, Issue 11, 1111002(2021)

Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory

Yazeng Gao^1,2,4, Lujie Wu^1,5, Weier Lu^1,2,4、*, Hongyao Liu^1,2、**, Yang Xia^1,2,4, Lili Zhao^1,2,4, Yanli Li³, Xiangdong Kong³, and Li Han³

Author Affiliations

¹Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

²School of Microelectronics, University of Chinese Academy of Sciences, Beijing 101407, China

³Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China

⁴Beijing Engineering Research Center for Microelectronics Preparation Equipment, Beijing 100029, China

⁵School of Science, Beijing Jiaotong University, Beijing 100044, China

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Yazeng Gao, Lujie Wu, Weier Lu, Hongyao Liu, Yang Xia, Lili Zhao, Yanli Li, Xiangdong Kong, Li Han. Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory[J]. Acta Optica Sinica, 2021, 41(11): 1111002

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Paper Information

Category: Imaging Systems

Received: Oct. 20, 2020

Accepted: Jan. 8, 2021

Published Online: Jun. 7, 2021

The Author Email: Lu Weier (luweier@ime.ac.cn), Liu Hongyao (liuhongyao@ime.ac.cn)

DOI:10.3788/AOS202141.1111002

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