Heterogeneous integration technology for the thermal management of Ga<sub>2</sub>O<sub>3</sub> power devices

Genquan Han; Tiangui You; Yibo Wang; Zheng-Dong Luo; Xin Ou; Yue Hao

doi:10.1088/1674-4926/44/6/060301

Journal of Semiconductors, Volume. 44, Issue 6, 060301(2023)

Heterogeneous integration technology for the thermal management of Ga₂O₃ power devices

Genquan Han^1、*, Tiangui You², Yibo Wang³, Zheng-Dong Luo¹, Xin Ou², and Yue Hao¹

Author Affiliations

¹School of Microelectronics, Xidian University, Xi’an 710071, China

²State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

³Suzhou institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China

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Genquan Han, Tiangui You, Yibo Wang, Zheng-Dong Luo, Xin Ou, Yue Hao. Heterogeneous integration technology for the thermal management of Ga₂O₃ power devices[J]. Journal of Semiconductors, 2023, 44(6): 060301

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Paper Information

Category: Articles

Received: May. 22, 2023

Accepted: --

Published Online: Jul. 6, 2023

The Author Email: Han Genquan (gqhan@xidian.edu.cn)

DOI:10.1088/1674-4926/44/6/060301

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology