Fig. 1. Schematic diagram of polarized laser scattering method

Fig. 2. Optical path of polarized laser scattering system

Fig. 3. Polarization laser scattering detection system

Fig. 4. Schematic diagram of subsurface crack of quartz glass in indentation

Fig. 5. Schematic Diagram of Indentation Scanning Scheme

Fig. 6. PLS detection results of subsurface crack with different indentations

Fig. 7. Surface morphology of abrasive specimens with different particle size

Fig. 8. PLS scattering results of specimens with different crack depths

Fig. 9. Relationship between PLS detection signal and SSD depth of grinding sample

Fig. 10. Section of the ground sample with abrasive grain size of 40 μm