Acta Photonica Sinica, Volume. 48, Issue 1, 131002(2019)
Study on Planarization Layer Uniformity of Large-aperture Optical Elements Based on Ion Beam Sputtering
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FENG Shi, FU Xiu-hua, WANG Da-sen, LI Xiao-jing, NIE Feng-ming, ZHANG Xu. Study on Planarization Layer Uniformity of Large-aperture Optical Elements Based on Ion Beam Sputtering[J]. Acta Photonica Sinica, 2019, 48(1): 131002
Received: Jul. 5, 2018
Accepted: --
Published Online: Jan. 27, 2019
The Author Email: Shi FENG (fengshi_optics@126.com)