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Acta Photonica Sinica, Volume. 48, Issue 1, 131002(2019)

Study on Planarization Layer Uniformity of Large-aperture Optical Elements Based on Ion Beam Sputtering

FENG Shi1...2,*, FU Xiu-hua1, WANG Da-sen2, LI Xiao-jing2, NIE Feng-ming2, and ZHANG Xu23 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    FENG Shi, FU Xiu-hua, WANG Da-sen, LI Xiao-jing, NIE Feng-ming, ZHANG Xu. Study on Planarization Layer Uniformity of Large-aperture Optical Elements Based on Ion Beam Sputtering[J]. Acta Photonica Sinica, 2019, 48(1): 131002

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    Paper Information

    Received: Jul. 5, 2018

    Accepted: --

    Published Online: Jan. 27, 2019

    The Author Email: Shi FENG (fengshi_optics@126.com)

    DOI:10.3788/gzxb20194801.0131002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology