Optoelectronics Letters, Volume. 9, Issue 1, 34(2013)
A new method to characterize the metallic-oxide films for grayscale lithography
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SUN Li-ping, ZHANG Shuang-gen, WANG Zhe, DENG Jia-chun, Lü Jiang. A new method to characterize the metallic-oxide films for grayscale lithography[J]. Optoelectronics Letters, 2013, 9(1): 34
Received: Oct. 5, 2012
Accepted: --
Published Online: Oct. 12, 2017
The Author Email: Li-ping SUN (lipingsunnk@163.com)