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Optoelectronics Letters, Volume. 9, Issue 1, 34(2013)

A new method to characterize the metallic-oxide films for grayscale lithography

Li-ping SUN1,*... Shuang-gen ZHANG2, Zhe WANG1, Jia-chun DENG1 and Jiang Lü1 |Show fewer author(s)
Author Affiliations
  • 1School of Science, Tianjin University of Technology, Tianjin 300384, China
  • 2Tianjin Key Laboratory of Film Electronic and Communication Device, Engineering Research Center of Communication
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    SUN Li-ping, ZHANG Shuang-gen, WANG Zhe, DENG Jia-chun, Lü Jiang. A new method to characterize the metallic-oxide films for grayscale lithography[J]. Optoelectronics Letters, 2013, 9(1): 34

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    Paper Information

    Received: Oct. 5, 2012

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Li-ping SUN (lipingsunnk@163.com)

    DOI:10.1007/s11801-013-2351-9

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology