Chinese Physics B, Volume. 29, Issue 8, (2020)

Selective linear etching of monolayer black phosphorus using electron beams

Yuhao Pan1, Bao Lei1,2, Jingsi Qiao1, Zhixin Hu3, Wu Zhou2, and Wei Ji1、†
Author Affiliations
  • 1Department of Physics and Beijing Key Laboratory of Optoelectronic Functional Materials & Micro-Nano Devices, Renmin University of China, Beijing 00872, China
  • 2School of Physical Sciences and CAS Center for Excellence in Topological Quantum Computation, University of Chinese Academy of Sciences, Beijing 100190, China
  • 3Center for Joint Quantum Studies and Department of Physics, Institute of Science, Tianjin University, Tianjin 0050, China
  • show less
    References(65)

    [1] M I Katsnelson. Mater. Today, 10, 20(2007).

    [2] K S Novoselov et al. Nature, 438, 197(2005).

    [3] A K Geim, K S Novoselov. Nat. Mater, 6, 183(2007).

    [4] E H Hwang, Sarma S Das. Phys. Rev. B, 77(2008).

    [5] A K Geim, I V Grigorieva. Nature, 499, 419(2013).

    [6] Z M Wang. MoS2: Materials, Physics, and Devices(2014).

    [7] Q H Wang, K Kalantar-Zadeh, A Kis, J N Coleman, M S Strano. Nat. Nanotechnol, 7, 699(2012).

    [8] R Fivaz, E Mooser. Phys. Rev, 163, 743(1967).

    [9] P Vogt et al. Phys. Rev. Lett, 108(2012).

    [10] M Houssa et al. Appl. Phys. Lett, 98(2011).

    [11] E Bianco et al. ACS Nano, 7, 4414(2013).

    [12] C Berger et al. J. Phys. Chem. B, 108(2004).

    [13] L Liao et al. Nature, 467, 305(2010).

    [14] F Schwierz. Nat. Nanotechnol, 5, 487(2010).

    [15] B Radisavljevic, A Radenovic, J Brivio, V Giacometti, A Kis. Nat. Nanotechnol, 6, 147(2011).

    [16] H Wang et al. Nano Lett, 12, 4674(2012).

    [17] Y Yoon, K Ganapathi, S Salahuddin. Nano Lett, 11, 3768(2011).

    [18] F Xia, D B Farmer, Y M Lin, P Avouris. Nano Lett, 10, 715(2010).

    [19] I Popov, G Seifert, D Tománek. Phys. Rev. Lett, 108(2012).

    [20] F Banhart, J Kotakoski, A V Krasheninnikov. ACS Nano, 5, 26(2011).

    [21] J Hong et al. Nat. Commun, 6, 6293(2015).

    [22] J Hong et al. Nano Lett, 17, 3383(2017).

    [23] J Hong et al. Nano Lett, 17, 6653(2017).

    [24] C Zhang et al. ACS Nano, 13, 1595(2019).

    [25] S Zhang et al. Phys. Rev. Lett, 119(2017).

    [26] W Zhou et al. Nano Lett, 13, 2615(2013).

    [27] T Susi, J C Meyer, J Kotakoski. Ultramicroscopy, 180, 163(2017).

    [28] X Zhao et al. MRS Bull, 42, 667(2017).

    [29] G Ye et al. Nano Lett, 16, 1097(2016).

    [30] L Ci et al. Nano Res, 1, 116(2008).

    [31] J Kotakoski, C Mangler, J C Meyer. Nat. Commun, 5, 3991(2014).

    [32] J C Meyer et al. Phys. Rev. Lett, 108(2012).

    [33] H P Komsa, A V Krasheninnikov. Phys. Rev. B, 91(2015).

    [34] J Zhao et al. Small, 13(2017).

    [35] T Susi et al. Phys. Rev. Lett, 113(2014).

    [36] A Chuvilin, JC Meyer, G Algara-Siller, U Kaiser. New J. Phys, 11(2009).

    [37] S Y Zhang, X Q X, X M Hua, Z L Xie, B Liu, P Chen, P Han, H Lu, R Zhang, Y D Zheng. Chin. Phys. Lett, 31(2014).

    [38] Y Deng, Y Wang, X L Li. Chin. Phys. Lett, 29(2012).

    [39] H P Komsa, S Kurasch, O Lehtinen, U Kaiser, A V Krasheninnikov. Phys. Rev. B, 88(2013).

    [40] J Qiao, X Kong, Z X Hu, F Yang, W Ji. Nat. Commun, 5, 4475(2014).

    [41] Z X Hu, X Kong, J Qiao, B Normand, W Ji. Nanoscale, 8, 2740(2016).

    [42] Q Jia, X Kong, J Qiao, W Ji. Sci. Chin. Phys. Mech. & Astron, 59(2016).

    [43] Y Ren. Chin. Phys. Lett, 34(2017).

    [44] F Cheng. Chin. Phys. Lett, 33(2016).

    [45] J Qiao, L Zhou, W Ji. Chin. Phys. B, 26(2017).

    [46] Z Xiao et al. Nano Res, 10, 2519(2017).

    [47] V Vierimaa, A V Krasheninnikov, H P Komsa. Nanoscale, 8, 7949(2016).

    [48] P E Blöchl. Phys. Rev. B, 50(1994).

    [49] G Kresse, J Furthmüller. Phys. Rev. B, 54(1996).

    [50] J Klimeš, D R Bowler, A Michaelides. Phys. Rev. B, 83(2011).

    [51] H P Komsa et al. Phys. Rev. Lett, 109(2012).

    [52] W A McKinley, H Feshbach. Phys. Rev, 74, 1759(1948).

    [53] R F Egerton. Microsc. Res. Technique, 75, 1550(2012).

    [54] N Dellby et al. Eur. Phys. J. - Appl. Phys, 54(2011).

    [55] J Qiao et al. Sci. Bull, 63, 159(2018).

    [56] L H Huo, G F Xie. Acta Phys. Sin, 68(2019).

    [57] A A Balandin et al. Nano Lett, 8, 902(2008).

    [58] A P Grosvenor, M C Biesinger, R S C Smart, N S McIntyre. Surf. Sci, 600, 1771(2006).

    [59] M Hilgendorff, V Sundström. J. Phys. Chem. B, 102(1998).

    [60] K A Willets, R P Van Duyne. Annu. Rev. Phys. Chem, 58, 267(2007).

    [61] S Kretschmer, T Lehnert, U Kaiser, A V Krasheninnikov. Nano Lett, 20, 2865(2020).

    [62] W Ji, Z Y Lu, H Gao. Phys. Rev. Lett, 97(2006).

    [63] K Anggara, L Leung, M J Timm, Z Hu, J C Polanyi. Sci. Adv, 4(2018).

    [64] W Chu et al. J. Am. Chem. Soc, 138(2016).

    [65] F Furche, R Ahlrichs. J. Chem. Phys, 117, 7433(2002).

    Tools

    Get Citation

    Copy Citation Text

    Yuhao Pan, Bao Lei, Jingsi Qiao, Zhixin Hu, Wu Zhou, Wei Ji. Selective linear etching of monolayer black phosphorus using electron beams[J]. Chinese Physics B, 2020, 29(8):

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Apr. 8, 2020

    Accepted: --

    Published Online: Apr. 29, 2021

    The Author Email: Ji Wei (wji@ruc.edu.cn)

    DOI:10.1088/1674-1056/ab9438

    Topics