Chinese Physics B, Volume. 29, Issue 8, (2020)
Selective linear etching of monolayer black phosphorus using electron beams
Fig. 1. (a) Top and side views of atomic structure of monolayer BP (V0P). The names of the zigzag-like chains and two tested atoms are marked. The upper (colored in plum) and lower (colored in light coral) chains are named
Fig. 2. Atomic structures of BP with vacancies and zigzag chain vacancy. (a)–(c) Top and side views of atomic structures of BP with double-atom vacancy (V2P), triple-atom vacancy (V3P), and quadruple-atom vacancy (V4P) with the tested atoms marked on them. (d) Predicted zigzag chain vacancy in monolayer BP.
Fig. 3. Electrical properties of predicted zigzag chain vacancy in monolayer BP. (a) Band structure and density of states of the chain vacancy. (b) PCD at bands MB1 and MB2, DCD, and atomic structure of the zigzag edge chain. (c) Band structure of double-periodic chain vacancies with and without up-and-down distortion. (c) PCD at bands MB1 and MB2, DCD, and atomic structure of the zigzag edge chain. (d) Top view (left) and side view (right) of the atomic structure of the chain vacancy with distortion.
Fig. 4. Five kinds of calculated edges in monolayer BP. Top views (a)–(e) and side views (f)–(j) of the atomic structures of the edges we focused on in monolayer BP. (k)–(o) Crystal directions of the corresponding edges.
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Yuhao Pan, Bao Lei, Jingsi Qiao, Zhixin Hu, Wu Zhou, Wei Ji. Selective linear etching of monolayer black phosphorus using electron beams[J]. Chinese Physics B, 2020, 29(8):
Received: Apr. 8, 2020
Accepted: --
Published Online: Apr. 29, 2021
The Author Email: Ji Wei (wji@ruc.edu.cn)