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Acta Optica Sinica, Volume. 36, Issue 9, 931001(2016)

Influence of Deposition Rate on Microstructure and Optical Properties of Mo Films Fabricated by Direct Current Pulse Sputtering

Zhao Jiaoling1,2、*, He Hongbo1, Wang Hu1,2, Guo Jialu1,2, and He Ting1,2
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    Zhao Jiaoling, He Hongbo, Wang Hu, Guo Jialu, He Ting. Influence of Deposition Rate on Microstructure and Optical Properties of Mo Films Fabricated by Direct Current Pulse Sputtering[J]. Acta Optica Sinica, 2016, 36(9): 931001

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    Paper Information

    Category: Thin Films

    Received: Mar. 30, 2016

    Accepted: --

    Published Online: Sep. 9, 2016

    The Author Email: Jiaoling Zhao (jolin923@siom.ac.cn)

    DOI:10.3788/aos201636.0931001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology