Infrared and Laser Engineering, Volume. 49, Issue 11, 20200043(2020)
Energy characteristics control of high-repetition frequency KrF excimer laser
[5] [5] Petrova T B, Petrov G M, Wolfd M F, et al. Modeling of an electronbeam pumped arf excimer laser[C]2017 IEEE International Conference on Plasma Science (ICOPS), 2017: 11.
[6] [6] Tsushima H, Fujimaki Y, Kiyota Y, et al. Extremely long life excimer laser chamber technology f multipatterning lithography[C]SPIE, 2019, 10961: 109610X.
[7] V F Losev, V F Losev, Y N Panchenko, Y N Panchenko, V V Dudarev, V V Dudarev. Development of discharge pulse repetition rate excimer lasers for different applications. Chinese Journal of Optics, 4, 1-8(2011).
[8] 袁靖超, Jingchao Yuan, 赵江山, Jiangshan Zhao, 李慧, Hui Li. Research of peak-detection algorithm based on absolute wavelength calibration of excimer laser. Chinese Journal of Lasers, 45, 19-25(2018).
[10] 梁勖, Xu Liang, 赵读亮, Duliang Zhao, 林颖, Ying Lin. High repetition rate and high accuracy capacitor charging pulse power supply based on controllable LC series resonance. High Voltage Engineering, 44, 3022-3027(2018).
[11] 周松青, Songqing Zhou, 黄珂, Ke Huang, 沈炎龙, Yanlong Shen. Design and experimental investigation of unstable resonator for discharge initiated repetitive-pulsed HF laser. Infrared and Laser Engineering, 48, 1005002(2019).
[14] [14] Ishida K, Ohta T, Miyamoto H, et al. The ArF laser f the nextgeneration multiplepatterning immersion lithography suppting green operations[C]SPIE 2016, 9780: 978010.
[15] 王效顺, Xiaoshun Wang, 梁勖, Xu Liang, 游利兵, Libing You. Study on energy control algorithm for high-repetition-rate ArF excimer lasers. Laser Technology, 36, 763-766(2012).
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Zebin Feng, Yi Zhou, Rui Jiang, Xiaoquan Han, Zexu Sun, Hua Zhang. Energy characteristics control of high-repetition frequency KrF excimer laser[J]. Infrared and Laser Engineering, 2020, 49(11): 20200043
Category: Lasers and laser optics
Received: Jan. 24, 2020
Accepted: --
Published Online: Jan. 4, 2021
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