Infrared and Laser Engineering, Volume. 49, Issue 11, 20200043(2020)

Energy characteristics control of high-repetition frequency KrF excimer laser

Zebin Feng1...2,3, Yi Zhou1,3, Rui Jiang1,3, Xiaoquan Han1,3, Zexu Sun2 and Hua Zhang3 |Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing RSLaser Opto-Electronics Technology Co., Ltd, Beijing 100176, China
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    [7] V F Losev, V F Losev, Y N Panchenko, Y N Panchenko, V V Dudarev, V V Dudarev. Development of discharge pulse repetition rate excimer lasers for different applications. Chinese Journal of Optics, 4, 1-8(2011).

    [8] 袁靖超, Jingchao Yuan, 赵江山, Jiangshan Zhao, 李慧, Hui Li. Research of peak-detection algorithm based on absolute wavelength calibration of excimer laser. Chinese Journal of Lasers, 45, 19-25(2018).

    [10] 梁勖, Xu Liang, 赵读亮, Duliang Zhao, 林颖, Ying Lin. High repetition rate and high accuracy capacitor charging pulse power supply based on controllable LC series resonance. High Voltage Engineering, 44, 3022-3027(2018).

    [11] 周松青, Songqing Zhou, 黄珂, Ke Huang, 沈炎龙, Yanlong Shen. Design and experimental investigation of unstable resonator for discharge initiated repetitive-pulsed HF laser. Infrared and Laser Engineering, 48, 1005002(2019).

    [14] [14] Ishida K, Ohta T, Miyamoto H, et al. The ArF laser f the nextgeneration multiplepatterning immersion lithography suppting green operations[C]SPIE 2016, 9780: 978010.

    [15] 王效顺, Xiaoshun Wang, 梁勖, Xu Liang, 游利兵, Libing You. Study on energy control algorithm for high-repetition-rate ArF excimer lasers. Laser Technology, 36, 763-766(2012).

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    Zebin Feng, Yi Zhou, Rui Jiang, Xiaoquan Han, Zexu Sun, Hua Zhang. Energy characteristics control of high-repetition frequency KrF excimer laser[J]. Infrared and Laser Engineering, 2020, 49(11): 20200043

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    Paper Information

    Category: Lasers and laser optics

    Received: Jan. 24, 2020

    Accepted: --

    Published Online: Jan. 4, 2021

    The Author Email:

    DOI:10.3788/IRLA20200043

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