Fig. 1. Single pulse energy variation law in excimer laser constant voltage operation mode

Fig. 2. Analysis results of laser single pulse energy characteristics. (a) Energy variation of pulses in Burst with different repetition frequency under constant high voltage mode; (b) Standard deviation of pulse energy in Burst with different repetition frequency under constant high voltage mode; (c) Histogram of laser pulse energy at the same position in Burst sequence under constant high voltage mode

Fig. 3. Schematic of single pulse energy simulation model of excimer laser

Fig. 4. Comparison of actual and simulated Burst pulse energy changes. (a) Time domain; (b) Frequency domain

Fig. 5. Block diagram of double closed-loop dose precision control algorithm

Fig. 6. Structural block diagram of dose accuracy control algorithm based on decision control

Fig. 7. Simulation experiment results: (a) Comparison of dose accuracy of double closed-loop and decision algorithms of the simulation model under repeated 4 kHz target energy at 10 mJ; (b) Comparison of the adaptability of dual closed-loop and decision control algorithms to target energy under simulation conditions; (c) Comparison of the adaptability of dual closed-loop and decision-control algorithms for re-frequency operation under simulation conditions

Fig. 8. Energy control algorithm feedback link diagram

Fig. 9. Comparison of experimental results between constant energy and constant high voltage mode : (a) Comparison of pulse energy in constant energy and constant high voltage mode; (b) Comparison chart of energy stability; (c) Comparison of dose accuracy

Fig. 10. Algorithm adaptive experiment results : (a) Effect of decision control algorithm on dose accuracy control under different target energy; (b) Effect of decision control algorithm on dose accuracy control at different work frequency