Acta Optica Sinica, Volume. 40, Issue 21, 2131001(2020)

Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering

Gang Chen1,3, Dingquan Liu1,2,3、*, Chong Ma1, Kaixuan Wang1,2, Li Zhang1, and Lingshan Gao1,3
Author Affiliations
  • 1Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(12)
    Spectral constant curves of Nb2O5 and SiO2 thin films. (a) Refractive index n; (b) extinction coefficients k
    Designed transmittance curves of two filters. (a) 1375 nm channel; (b) 1610 nm channel
    Schematic DIBS experimental setup
    Designed and tested optical transmittance curves of 1375 nm filter. (a) Test range of 900-1800 nm;(b) test range of 1350-1400 nm
    Designed and tested transmittance curves of 1610 nm filter. (a) Test range of 900-1800 nm; (b) test range of 1520-1700 nm
    Optical microscope images of the surface of filter prepared by IBAD. (a) 1610 nm channel; (b) 1375 nm channel
    AFM images of the surface of filter prepared by IBAD. (a) 1610 nm channel; (b) 1375 nm channel
    Optical images of the surface of filter prepared by DIBS. (a) 1610 nm channel; (b) 1375 nm channel
    AFM images of the surface of filter prepared by DIBS. (a) 1610 nm channel; (b) 1375 nm channel
    Output electric signals of detector after coupling with filters. (a) 1375 nm channel; (b) 1610 nm channel
    • Table 1. Relevant parameters for preparing filters using DIBS technology

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      Table 1. Relevant parameters for preparing filters using DIBS technology

      TargetRF16RF12Deposition rate /(nm·s-1 )
      Voltage /VCurrent /mAFlow /(mL·min-1)Voltage /VCurrent /mAFlow /(mL·min-1)
      Nb125060018(Ar)4001503(Ar),12(O2)0.27
      SiO2125060018(Ar)400753(Ar),12(O2)0.21
    • Table 2. Surface roughness of filters prepared by IBAD and DIBS

      View table

      Table 2. Surface roughness of filters prepared by IBAD and DIBS

      Surface roughnessIBADDIBS
      1375 nm1610 nm1375 nm1610 nm
      Max /nm449.28868.404.853.90
      Min /nm-315.38-96.80-5.06-3.19
      Peak-to-peak /nm764.66965.219.917.09
      Root-mean-square /nm78.2538.340.810.57
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    Gang Chen, Dingquan Liu, Chong Ma, Kaixuan Wang, Li Zhang, Lingshan Gao. Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering[J]. Acta Optica Sinica, 2020, 40(21): 2131001

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    Paper Information

    Category: Thin Films

    Received: Jun. 5, 2020

    Accepted: Jul. 15, 2020

    Published Online: Oct. 25, 2020

    The Author Email: Liu Dingquan (dqliu@mail.sitp.ac.cn)

    DOI:10.3788/AOS202040.2131001

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