Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering

Gang Chen; Dingquan Liu; Chong Ma; Kaixuan Wang; Li Zhang; Lingshan Gao

doi:10.3788/AOS202040.2131001

Acta Optica Sinica, Volume. 40, Issue 21, 2131001(2020)

Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering

Gang Chen^1,3, Dingquan Liu^1,2,3、*, Chong Ma¹, Kaixuan Wang^1,2, Li Zhang¹, and Lingshan Gao^1,3

Author Affiliations

¹Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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Gang Chen, Dingquan Liu, Chong Ma, Kaixuan Wang, Li Zhang, Lingshan Gao. Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering[J]. Acta Optica Sinica, 2020, 40(21): 2131001

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Paper Information

Category: Thin Films

Received: Jun. 5, 2020

Accepted: Jul. 15, 2020

Published Online: Oct. 25, 2020

The Author Email: Liu Dingquan (dqliu@mail.sitp.ac.cn)

DOI:10.3788/AOS202040.2131001

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