Laser & Optoelectronics Progress, Volume. 58, Issue 9, 0914003(2021)
Analysis of Influence of Temperature Distribution in Spectral Control of Excimer Lasers for Lithography on Output Spectra
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Qian Wang, Jiangshan Zhao, Xin Guo, Yuanyuan Fan, Yi Zhou, Rui Jiang. Analysis of Influence of Temperature Distribution in Spectral Control of Excimer Lasers for Lithography on Output Spectra[J]. Laser & Optoelectronics Progress, 2021, 58(9): 0914003
Category: Lasers and Laser Optics
Received: Sep. 1, 2020
Accepted: Sep. 30, 2020
Published Online: May. 12, 2021
The Author Email: Zhou Yi (zhouyi@aoe.ac.cn)