Analysis of Influence of Temperature Distribution in Spectral Control of Excimer Lasers for Lithography on Output Spectra

Qian Wang; Jiangshan Zhao; Xin Guo; Yuanyuan Fan; Yi Zhou; Rui Jiang

doi:10.3788/LOP202158.0914003

Laser & Optoelectronics Progress, Volume. 58, Issue 9, 0914003(2021)

Analysis of Influence of Temperature Distribution in Spectral Control of Excimer Lasers for Lithography on Output Spectra

Qian Wang^1,2, Jiangshan Zhao^1,2,3, Xin Guo^1,2, Yuanyuan Fan^1,2,3,4, Yi Zhou^1,2,3、*, and Rui Jiang^1,2,3

Author Affiliations

¹Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100094, China

²Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China

³University of Chinese Academy of Sciences, Beijing 100094, China

⁴The State Key Laboratory of Applied Optics, Changchun , Jilin 130033, China

show less

Abstract Get PDF(in Chinese)

Figures & Tables(13)

Fig. 1. Beam propagation path in LNM

Download full size

Fig. 2. Temperature distribution of the prism at different moments when the laser interacts with the prism. （a） 1 min；（b） 10 min；（c） 30 min

Download full size

$Refractive index of the prism center point changed with time when the laser interacts with the prism$

Fig. 3. Refractive index of the prism center point changed with time when the laser interacts with the prism

Download full size

$Distribution of refractive index of the prism when the laser interacts with the prism in the linewidth narrowing module. （a） 1 min；（b） 10 min；（c） 30 min；（d） distribution of refractive index after the laser interacts with LNM for 30 min when the display scale is refined$

Fig. 4. Distribution of refractive index of the prism when the laser interacts with the prism in the linewidth narrowing module. （a） 1 min；（b） 10 min；（c） 30 min；（d） distribution of refractive index after the laser interacts with LNM for 30 min when the display scale is refined

Download full size

Fig. 5. Internal temperature distribution of linewidth narrowing module

Download full size

Fig. 6. Grating surface temperature distribution

Download full size

Fig. 7. Schematic of gas purging device. (a) Top view；（b） side view

Download full size

Fig. 8. When using He and N₂ purging, the temperature distribution in the linewidth narrowing module. （a） He；（b） N₂

Download full size

Fig. 9. Temperature distribution of the grating surface when using He and N₂ purging. （a） He；（b） N₂

Download full size

Fig. 10. Spectral output results when using different inert gases for purging (30 min). （a） He；（b） N₂

Download full size

Fig. 11. Instantaneous spectral output results when using different inert gases for purging. （a） He；（b） N₂

Download full size

Table 1. Physical properties of CaF₂^[10]

View table

Table 1. Physical properties of CaF₂^[10]

Parameter	Value
Density /(g·cm-3)	3.18
Refractive index	1.4687@248 nm
$\frac{Δ n}{Δ T}$ /℃-1	-10.6×10-6(20-40 ℃)
Thermal conductivity /（W·m-1·K-1）	9.7
Specific heat capacity /（J·g-1·K-1）	0.893
Thermal diffusivity /（cm2·s-1）	35.6
Melting point /℃	1360
Expansion coefficient /℃-1	2.08×10-5

Table 2. Physical properties of He and N₂
View table
Table 2. Physical properties of He and N₂
Gas type Refractive index Thermal conductivity /(W·m-1·K-1)
He 1.000035 -0.09 ×10-6 0.16@43 ℃
N2 1.000315 -0.90 ×10-6 0.054@43 ℃

Tools

Get Citation

Copy Citation Text

Qian Wang, Jiangshan Zhao, Xin Guo, Yuanyuan Fan, Yi Zhou, Rui Jiang. Analysis of Influence of Temperature Distribution in Spectral Control of Excimer Lasers for Lithography on Output Spectra[J]. Laser & Optoelectronics Progress, 2021, 58(9): 0914003

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites