Optics and Precision Engineering, Volume. 30, Issue 21, 2688(2022)

Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray

Jun YU... Zhanshan WANG*, Qiushi HUANG, Zhong ZHANG, Zhenxiang SHEN, Hongfei JIAO, Pengfeng SHENG, Jingjing XIA and Yifan WANG |Show fewer author(s)
Author Affiliations
  • Institute of Precision Optical Engineering, MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai Frontiers Science Center of Digital Optics, Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, School of Physics Science and Engineering, Tongji University, Shanghai200092, China
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    Jun YU, Zhanshan WANG, Qiushi HUANG, Zhong ZHANG, Zhenxiang SHEN, Hongfei JIAO, Pengfeng SHENG, Jingjing XIA, Yifan WANG. Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J]. Optics and Precision Engineering, 2022, 30(21): 2688

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    Paper Information

    Received: Jul. 22, 2022

    Accepted: --

    Published Online: Nov. 28, 2022

    The Author Email: WANG Zhanshan (wangzs@tongji.edu.cn)

    DOI:10.37188/OPE.20223021.2688

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