Fig. 1. Flow chart of surface forming technology of ultra-precision turning and fine polishing

Fig. 2. Lightweight aluminum alloy reflector manufactured by additive manufacture

Fig. 3. Surface shape of SLM aluminum alloy by direct single point turning

Fig. 4. Surface roughness of SLM aluminum alloy by direct single point turning

Fig. 5. Surface roughness of nickel-phosphorus alloy by single point turning

Fig. 6. Surface roughness after magneto-rheological polishing

Fig. 7. Surface roughness after chemical mechanical polishing

Fig. 8. Flow chart of Wolter-I microscope mandrel

Fig. 9. Single point turning mandrel

Fig. 10. In-situ measurement results of surface shape after turning

Fig. 11. Surface shape and roughness of mandrel after polishing

Fig. 12. Large size flat polishing platform and machining results

Fig. 13. 240 mm long silicon flat mirror

Fig. 14. Interferometer test results of monocrystalline silicon flat mirror after contour coating modification

Fig. 15. Test results of plane mirror after two times modification

Fig. 16. Equipment for full spatial frequency characterization platform

Fig. 17. Full spectrum characterization of monocrystalline silicon flat mirror

Fig. 18. Algorithm-based stitching interferometry

Fig. 19. Schematic diagram of transformation relation between translation rotation and off-axis rotation

Fig. 20. Test results of plane bending mirror used in SSRF 15U laboratory station

Fig. 21. Figure measurement results of elliptical cylindrical mirror fabricated by profile coating

Fig. 22. Optical testing and results of primary and secondary mirrors for EUV telescope

Fig. 23. Optical testing and result of EUV telescope

Fig. 24. Surface roughness results before and after polishing

Fig. 25. Primary and secondary mirror after coating