Optics and Precision Engineering, Volume. 30, Issue 21, 2688(2022)
Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray
High-precision extreme ultraviolet and X-ray observations for space exploration require the development of advanced micro materials for the numerous high-precision optical reflection elements used in such observations. Because short wavelengths are more prone to scattering on optical surfaces, the precision requirements and the fabrication techniques of short-wavelength optical components differ significantly from those of long-wavelength optical components. The Institute of Precision Optical Engineering (IPOE) at Tongji University has 20 years of research experience in this field. We have built a high-accuracy fabrication and measurement platform based on short-wavelength mirrors, developed an ion beam configuration of an ultra-smooth aspheric surface, proposed an absolute measurement method using random off-axis rotation based on Zernike polynomials, and formed a complete technology chain to develop aspheric reflector substrates. These optical components and systems have been successfully applied at several short-wavelength science facilities both in China and abroad. This study will briefly introduce the recent research progress on these optical aspheric reflectors at the IPOE.
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Jun YU, Zhanshan WANG, Qiushi HUANG, Zhong ZHANG, Zhenxiang SHEN, Hongfei JIAO, Pengfeng SHENG, Jingjing XIA, Yifan WANG. Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J]. Optics and Precision Engineering, 2022, 30(21): 2688
Received: Jul. 22, 2022
Accepted: --
Published Online: Nov. 28, 2022
The Author Email: WANG Zhanshan (wangzs@tongji.edu.cn)