Infrared and Laser Engineering, Volume. 44, Issue 2, 461(2015)
Damage characteristics of polysilicon under wavelengths of 1 064 nm, 532 nm and 355 nm laser irradiation
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Feng Aixin, Zhuang Xuhua, Xue Wei, Han Zhenchun, Sun Tietun, Cheng Fengguo, Zhong Guoqi, Yin Cheng, He Ye. Damage characteristics of polysilicon under wavelengths of 1 064 nm, 532 nm and 355 nm laser irradiation[J]. Infrared and Laser Engineering, 2015, 44(2): 461
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