Opto-Electronic Engineering, Volume. 51, Issue 7, 240113(2024)

Research on high-precision dynamic focus detection technology of differential critical angle method

Lingna Peng1...2, Yuanyuan Zhao1,2, Yang Zhang1,2, and Xuanming Duan12,* |Show fewer author(s)
Author Affiliations
  • 1Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou, Guangdong 511443, China
  • 2School of Physics and Optoelectronic Engineering, Jinan University, Guangzhou, Guangdong 510632, China
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    [13] X P Hao, J Y Ren, Z S Zou. Design of focus error detection system based on critical angle method. Opt Precis Eng, 17, 537-541(2009).

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    [21] J H Wen, C S Zhao, F E Jiang et al. Study of driving and controlling with fast steering mirror based on PZT. Ordnance Ind Autom, 34, 59-64(2015).

    [22] J P Yang, J L Du, F X Li et al. Deep learning based method for automatic focus detection in digital lithography. Acta Photon Sin, 51, 0611002(2022).

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    Lingna Peng, Yuanyuan Zhao, Yang Zhang, Xuanming Duan. Research on high-precision dynamic focus detection technology of differential critical angle method[J]. Opto-Electronic Engineering, 2024, 51(7): 240113

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    Paper Information

    Category: Article

    Received: May. 14, 2024

    Accepted: Jun. 21, 2024

    Published Online: Nov. 12, 2024

    The Author Email: Duan Xuanming (段宣明)

    DOI:10.12086/oee.2024.240113

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