Opto-Electronic Engineering, Volume. 51, Issue 7, 240113(2024)
Research on high-precision dynamic focus detection technology of differential critical angle method
Figures & Tables(11)
Fig. 1. (a) Intensity reflection coefficient diagram; (b) Schematic diagram of principle diagram of critical angle focus detection
Fig. 2. The principle of beam convergence and divergence. (a) Optical path map at the near focal plane; (b) Optical path map at the far focal plane
Fig. 3. (a) The relationship between defocus and FES of critical angle prisms with different n; (b) Design diagram of critical angle prism
Fig. 4. Principle design diagram and experimental diagram of the differential critical angle method focus detection system. (a) Optical path principle diagram; (b) Experimental optical path diagram
Fig. 5. The relationship between defocus amount and output defocus signal when NA=0.3.(a) Single detector defocus signal; (b) Differential signal defocus signal
Fig. 6. The relationship between defocus amount and output defocus signal when NA=0.45. (a) Single detector defocus signal; (b) Differential signal defocus signal
Fig. 8. Output signal bar charts using different incremental differential critical angle focusing signals. (a) and (b) are step by step at 50 nm and 25 nm, respectively
Fig. 9. Output signal bar charts using different incremental differential critical angle focusing signals (NA =0.45). (a) and (b) are step by step at 50 nm and 25 nm, respectively
Table 1. NA=0.3 output signal results using different incremental critical angle focusing signals
View tableView in ArticleTable 1. NA=0.3 output signal results using different incremental critical angle focusing signals
Defocus/μm −0.5 −0.45 −0.4 −0.35 −0.3 −0.25 −0.2 K −0.01738 −0.01538 −0.01423 −0.01327 −0.01231 −0.00831 −0.00702 Defocus/μm −0.15 −0.1 −0.05 0 0.05 0.1 0.15 K −0.00615 −0.00401 −0.00214 −0.0001 0.00314 0.00522 0.00677 Defocus/μm 0.2 0.25 0.3 0.35 0.4 0.45 0.5 K 0.00791 0.00922 0.01211 0.01355 0.0147 0.01574 0.01695 Defocus/μm −0.25 −0.225 −0.2 −0.175 −0.15 −0.125 −0.1 K −0.00855 −0.00755 −0.00697 −0.00667 −0.00611 −0.00415 −0.00357 Defocus/μm −0.075 −0.05 −0.025 0 0.025 0.05 0.075 K −0.00297 −0.00214 −0.00121 −0.0009 0.00156 0.00271 0.00312 Defocus/μm 0.1 0.125 0.15 0.175 0.2 0.225 0.25 K 0.00453 0.00496 0.00597 0.00671 0.00737 0.00787 0.00854
Table 2. Output signal results using different incremental critical angle focusing signals (NA =0.45)
View tableView in ArticleTable 2. Output signal results using different incremental critical angle focusing signals (NA =0.45)
Defocus/μm −0.5 −0.45 −0.4 −0.35 −0.3 −0.25 −0.2 K −0.01551 −0.01433 −0.01311 −0.01211 −0.01042 −0.00942 −0.00798 Defocus/μm −0.15 −0.1 −0.05 0 0.05 0.1 0.15 K −0.00642 −0.00417 −0.00223 −0.00019 0.00167 0.00341 0.00512 Defocus/μm 0.2 0.25 0.3 0.35 0.4 0.45 0.5 K 0.00634 0.00825 0.00978 0.01124 0.01345 0.01467 0.01636 Defocus/μm −0.25 −0.225 −0.2 −0.175 −0.15 −0.125 −0.1 K −0.00756 −0.00715 −0.00634 −0.00597 −0.00513 −0.00423 −0.00317 Defocus/μm −0.075 −0.05 −0.025 0 0.025 0.05 0.075 K −0.00297 −0.00215 −0.00121 −0.00023 0.00124 0.00174 0.00257 Defocus/μm 0.1 0.125 0.15 0.175 0.2 0.225 0.25 K 0.00323 0.00414 0.00489 0.00512 0.00671 0.00774 0.00857
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Lingna Peng, Yuanyuan Zhao, Yang Zhang, Xuanming Duan. Research on high-precision dynamic focus detection technology of differential critical angle method[J]. Opto-Electronic Engineering, 2024, 51(7): 240113
Paper Information
Category: Article
Received: May. 14, 2024
Accepted: Jun. 21, 2024
Published Online: Nov. 12, 2024
The Author Email: Duan Xuanming (段宣明)
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