Semiconductor Optoelectronics, Volume. 42, Issue 6, 849(2021)
Effect of Oxygen Partial Pressure During Sputtering on Structural and Optical Properties of β-Ga2O3 Thin Films
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DONG Bin, HE Chenguang, WANG Changan, LI Qixin, LI Yelin, LIU Ningyang, ZHAO Wei, CHEN Zhitao. Effect of Oxygen Partial Pressure During Sputtering on Structural and Optical Properties of β-Ga2O3 Thin Films[J]. Semiconductor Optoelectronics, 2021, 42(6): 849
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Received: Oct. 22, 2021
Accepted: --
Published Online: Feb. 14, 2022
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