Semiconductor Optoelectronics, Volume. 43, Issue 4, 752(2022)

Chromatic Confocal Microscopy Measurement Technique: A Review

WANG Zi1...2, SHI Junkai1,*, CHEN Xiaomei1, JIANG Xingjian1, LI Guannan1, HUO Shuchun1, GAO Chao1,2, ZHU Qiang1,2, and ZHOU Weihu12 |Show fewer author(s)
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    References(42)

    [1] [1] Mullan F, Bartlett D, Austin R S. Measurement uncertainty associated with chromatic confocal profilometry for 3D surface texture characterization of natural human enamel[J]. Dental Materials, 2017, 33(6): e273-e281.

    [2] [2] Jumelle C, Hamri A, Egaud G, et al. Comparison of four methods of surface roughness assessment of corneal stromal bed after lamellar cutting[J]. Biomedical Optics Express, 2017, 8(11): 4974-4986.

    [3] [3] Zamofing T, Hugli H. Applied multifocus 3D microscopy[C]// Two-and Three-Dimensional Vision Systems for Inspection, Control and Metrology, 2004: 134-144.

    [6] [6] Sychugov I, Omi H, Murashita T, et al. Optical and electrical characterization at the nanoscale with a transparent probe of a scanning tunnelling microscope[J]. Nanotechnology, 2009, 20(14): 145706.

    [7] [7] Ortlepp I, Stauffenberg J, Manske E. Processing and analysis of long-range scans with an atomic force microscope (AFM) in combination with nanopositioning and nanomeasuring technology for defect detection and quality control[J]. Sensors, 2021, 21(17): 5862.

    [8] [8] Grochalski K, Mendak M, Jakubowicz M, et al. Differences in roughness parameter values from skid and skidless contact stylus profilometers[J]. Advances in Science and Technology. Research J., 2021, 15(1): 58-70.

    [9] [9] Li Y H, Feng Q B. Overview of optical 3D profile measurement[J]. Laser & Infrared, 2005, 35(3): 143-147.

    [10] [10] Wyant J C. White light interferometry[C]// Holography: A Tribute to Yuri Denisyuk and Emmett Leith, 2002: 98-107.

    [11] [11] Kienle P, Batarilo L, Akgül M, et al. Optical setup for error compensation in a laser triangulation system[J]. Sensors, 2020, 20(17): 4949.

    [18] [18] Tiziani H J, Uhde H M. Three-dimensional image sensing by chromatic confocal microscopy[J]. Appl. Optics, 1994, 33(10): 1838-1843.

    [19] [19] Dudley J M, Genty G, Coen S. Supercontinuum generation in photonic crystal fiber[J]. Rev. of Modern Physics, 2006, 78(4): 1135.

    [20] [20] Shi K, Li P, Yin S, et al. Chromatic confocal microscopy using supercontinuum light[J]. Opt. Express, 2004, 12(10): 2096-2101.

    [21] [21] Meneses J, Tribillon G, Gharbi T, et al. Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre[J]. J. of Optics A: Pure and Appl. Optics, 2004, 6(6): 544.

    [22] [22] Minoni U, Manili G, Bettoni S,et al. Chromatic confocal setup for displacement measurement using a supercontinuum light source[J]. Optics & Laser Technol., 2013, 49: 91-94.

    [23] [23] Matthias H, Lucia L, Roman K, et al. Spectrally multiplexed chromatic confocal multipoint sensing[J]. Opt. Lett., 2013, 38(22): 4694-4697.

    [24] [24] Chen X, Nakamura T, Shimizu Y, et al. A chromatic confocal probe with a mode-locked femtosecond laser source[J]. Optics & Laser Technol., 2018, 103: 359-366.

    [25] [25] Kim T, Kim S H, Do D, et al. Chromatic confocal microscopy with a novel wavelength detection method using transmittance[J]. Opt. Express, 2013, 21(5): 6286-6294.

    [26] [26] Roider C, Ritsch-Marte M, Jesacher A. High-resolution confocal Raman microscopy using pixel reassignment[J]. Opt. Lett., 2016, 41(16): 3825-3828.

    [27] [27] Matthias H, Lucia L, Roman K, et al. Spectrally multiplexed chromatic confocal multipoint sensing[J]. Opt. Lett., 2013, 38(22): 4694-4697.

    [28] [28] Jeong D, Park S J, Jang H, et al. Swept-source-based chromatic confocal microscopy[J]. Sensors, 2020, 20(24): 7347.

    [29] [29] Wang P, Kirkland A, Nellist P. Chromatic confocal electron microscopy with a finite pinhole size[J]. J. of Physics: Conf. Series, 2012: 012002.

    [30] [30] Nouira H, El-Hayek N, Yuan X, et al. Characterization of the main error sources of chromatic confocal probes for dimensional measurement[J]. Measurement Science and Technology, 2014, 25(4): 044011.

    [31] [31] Sepp J, Niemel K, Lassila A. Metrological characterization methods for confocal chromatic line sensors and optical topography sensors[J]. Measurement Science and Technology, 2018, 29(5): 054008.

    [32] [32] Strother J A. Reduction of spherical and chromatic aberration in axial-scanning optical systems with tunable lenses[J]. Biomedical Opt. Express, 2021, 12(6): 3530-3552.

    [35] [35] Yu Q, Zhang K, Zhou R, et al. Calibration of a chromatic confocal microscope for measuring a colored specimen[J]. IEEE Photonics J., 2018, 10(6): 1-9.

    [36] [36] Lu W, Chen C, Wang J, et al. Characterization of the displacement response in chromatic confocal microscopy with a hybrid radial basis function network[J]. Opt. Express, 2019, 27(16): 22737-22752.

    [37] [37] Chen C, Leach R, Wang J, et al. Two-dimensional spectral signal model for chromatic confocal microscopy[J]. Opt. Express, 2021, 29(5): 7179-7196.

    [38] [38] Bai J, Li X, Wang X, et al. Chromatic confocal displacement sensor with optimized dispersion probe and modified centroid peak extraction algorithm[J]. Sensors, 2019, 19(16): 3592.

    [39] [39] Qi Y, Lu Z, Ma J, et al. Research on micro displacement measurement technology based on chromatic confocal method[C]// 9th Inter. Symposium on Adv. Optical Manufacturing and Testing Technologies: Micro-and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 2019: 108401G.

    [40] [40] Algamili A S, Khir M H M, Dennis J O, et al. A review of actuation and sensing mechanisms in MEMS-based sensor devices[J]. Nanoscale Research Letters, 2021, 16(1): 1-21.

    [41] [41] Zhu J, Liu X, Shi Q, et al. Development trends and perspectives of future sensors and MEMS/NEMS[J]. Micromachines, 2020, 11(1): 7.

    [42] [42] Hu H, Mei S, Fan L, et al. A line-scanning chromatic confocal sensor for three-dimensional profile measurement on highly reflective materials[J]. Rev. of Scientific Instruments, 2021, 92(5): 053707.

    [43] [43] Zint M, Stock K, Claus D, et al. Development and verification of a snapshot dental intraoral three-dimensional scanner based on chromatic confocal imaging[J]. J. of Medical Imaging, 2019, 6(3): 033502.

    [44] [44] Kulkarni N, Masciola A, Nishant A, et al. Low-cost, chromatic confocal endomicroscope for cellular imaging in vivo[J]. Biomedical Optics Express, 2021, 12(9): 5629-5643.

    [45] [45] Wang Y, Xi M, Liu H, et al. On-machine noncontact scanning of high-gradient freeform surface using chromatic confocal probe on diamond turning machine[J]. Optics & Laser Technol., 2021, 134: 106569.

    [46] [46] Fu S, Kor W S, Cheng F, et al. In-situ measurement of surface roughness using chromatic confocal sensor[J]. Procedia CIRP, 2020, 94: 780-784.

    [47] [47] Claus D, Nizami M R. Influence of aberrations and roughness on the chromatic confocal signal based on experiments and wave-optical modeling[J]. Surface Topography: Metrology and Properties, 2020, 8(2): 025031.

    [49] [49] Miks A, Novak J, Novak P. Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor[J]. Appl. Optics, 2010, 49(17): 3259-3264.

    [52] [52] Boettcher T, Gronle M, Osten W. Single-shot multilayer measurement by chromatic confocal coherence tomography[C]// Optical Measurement Systems for Industrial Inspection Ⅹ, 2017: 103290K.

    [53] [53] Li J, Zhao Y, Du H, et al. Adapative modal decomposition based overlapping-peaks extraction for the thickness measurement in chromatic confocal microscopy[J]. Opt. Express, 2020, 28(24): 36176-36187.

    [54] [54] Yu Q, Zhang Y, Shang W, et al. Thickness measurement for glass slides based on chromatic confocal microscopy with inclined illumination[J]. Photonics, 2021, 8(170): 8050170.

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    WANG Zi, SHI Junkai, CHEN Xiaomei, JIANG Xingjian, LI Guannan, HUO Shuchun, GAO Chao, ZHU Qiang, ZHOU Weihu. Chromatic Confocal Microscopy Measurement Technique: A Review[J]. Semiconductor Optoelectronics, 2022, 43(4): 752

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    Paper Information

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    Received: Feb. 16, 2022

    Accepted: --

    Published Online: Oct. 16, 2022

    The Author Email: Junkai SHI (shijunkai@ime.ac.cn)

    DOI:10.16818/j.issn1001-5868.2022021601

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